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Titolo:
Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures
Autore:
Herrmann, F; Weihnacht, M; Buttgenbach, S;
Indirizzi:
Robert Bosch Corp, Palo Alto, CA 94304 USA Robert Bosch Corp Palo Alto CAUSA 94304 ch Corp, Palo Alto, CA 94304 USA Inst Solid State & Mat Res, D-01069 Dresden, Germany Inst Solid State & Mat Res Dresden Germany D-01069 1069 Dresden, Germany Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany Tech Univ Braunschweig Braunschweig Germany D-38106 raunschweig, Germany
Titolo Testata:
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
fascicolo: 1, volume: 48, anno: 2001,
pagine: 268 - 273
SICI:
0885-3010(200101)48:1<268:POSBOS>2.0.ZU;2-G
Fonte:
ISI
Lingua:
ENG
Soggetto:
MODE; LIQUIDS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
20
Recensione:
Indirizzi per estratti:
Indirizzo: Herrmann, F Robert Bosch Corp, Palo Alto, CA 94304 USA Robert Bosch Corp Palo Alto CA USA 94304 o Alto, CA 94304 USA
Citazione:
F. Herrmann et al., "Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures", IEEE ULTRAS, 48(1), 2001, pp. 268-273

Abstract

Acoustic wave devices based on waveguide modes with shear-horizontal polarization, i.e., Love modes, are very promising for sensor application, especially in liquid environments. They can be used for the determination of liquid density and viscosity as well as for chemical sensors. Up to now, several systems have been reported based on standard ST quartz. Those devices lack temperature stability which is essential for field application, Thus, temperature-compensated systems based on different Y-rotated quartz and lithium tantalate (LiTaO3) plates with SiO2 guiding layers have been investigated. Temperature behavior as well as relevant acoustic properties were considered. Furthermore, experimentally determined data for device sensitivity are compared with theoretical predictions from numerical calculations.

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Documento generato il 05/12/20 alle ore 10:22:10