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Titolo:
Characterisation by X-ray absorption spectroscopy of oxide thin films prepared by ion beam-induced CVD
Autore:
Holgado, JP; Caballero, A; Espinos, JP; Morales, J; Jimenez, VM; Justo, A; Gonzalez-Elipe, AR;
Indirizzi:
Univ Sevilla, CSIC, Inst Ciencia Mat Sevilla, Seville 41092, Spain Univ Sevilla Seville Spain 41092 encia Mat Sevilla, Seville 41092, Spain Dept Quim Inorgan, Seville 41092, Spain Dept Quim Inorgan Seville Spain 41092 Quim Inorgan, Seville 41092, Spain
Titolo Testata:
THIN SOLID FILMS
, volume: 377, anno: 2000,
pagine: 460 - 466
SICI:
0040-6090(200012)377:<460:CBXASO>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; TOTAL-ELECTRON-YIELD; FINE-STRUCTURE; FLUORESCENCE; TIO2; APPARATUS; SPECTRA; XANES;
Keywords:
ion beam-induced chemical vapour deposition (IBICVD); thin films; extended X-ray absorption fine structure; (EXAFS); X-ray absorption near-edge structure (XANES); cobalt oxide; lead titanate;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
39
Recensione:
Indirizzi per estratti:
Indirizzo: Gonzalez-Elipe, AR Univ Sevilla, CSIC, Inst Ciencia Mat Sevilla, Avda Americo Vespucio S-N, Seville 41092, Spain Univ Sevilla Avda Americo Vespucio S-N Seville Spain 41092
Citazione:
J.P. Holgado et al., "Characterisation by X-ray absorption spectroscopy of oxide thin films prepared by ion beam-induced CVD", THIN SOL FI, 377, 2000, pp. 460-466

Abstract

Structural characterisation of amorphous or partially amorphous thin filmscan be carried out by X-ray absorption spectroscopy in its X-ray absorption near-edge structure (XANES) and extended X-ray absorption fine structure (EXAFS) approaches. The EXAFS spectra have been analysed using the FEFF procedure, while XANES spectra are dealt with on a fingerprint basis. PbTiO3 and CoO/Co3O4 thin films prepared by ion beam induced chemical vapour deposition (IBICVD) have been chosen as case examples. For PbTiO3, comparison of X-ray diffraction (XRD) and XANES results show that the original film consists of a mixture of lead and amorphous TiO2. By annealing at 723 K, a well-crystallised PbTiO3 perovskite structure is formed without any segregation of titanium oxide or lead phases. As-prepared Cobalt oxides thin films wereamorphous by XRD, but became crystalline by annealing at T greater than orequal to 573 K. Characterisation of the amorphous state in terms of the minimum size of clusters or homogeneity of the films was carried out by FEFF analysis of the EXAFS spectra. The combined used of the X-ray absorption spectroscopy (XAS) and XRD methods to structurally characterise thin films may provide information about the crystallisation processes that occur when amorphous thin films are annealed at high temperatures. (C) 2000 Elsevier Science B.V. All rights reserved.

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Documento generato il 28/11/20 alle ore 21:07:57