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Titolo:
Ultra-thin film photodiodes for use in position sensors
Autore:
Mi, XY; Sasaki, M; Hane, K;
Indirizzi:
Tohoku Univ, Grad Sch Engn, Dept Mechatron & Precis Engn, Sendai, Miyagi 9808579, Japan Tohoku Univ Sendai Miyagi Japan 9808579 gn, Sendai, Miyagi 9808579, Japan
Titolo Testata:
JOURNAL OF MODERN OPTICS
fascicolo: 1, volume: 48, anno: 2001,
pagine: 55 - 66
SICI:
0950-0340(200101)48:1<55:UFPFUI>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
DISPLACEMENT SENSOR; OPTICAL FEEDBACK; LASER-DIODE; INTERFEROMETER;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
9
Recensione:
Indirizzi per estratti:
Indirizzo: Mi, XY Tohoku Univ, Grad Sch Engn, Dept Mechatron & Precis Engn, Sendai, Miyagi 9808579, Japan Tohoku Univ Sendai Miyagi Japan 9808579 dai, Miyagi 9808579, Japan
Citazione:
X.Y. Mi et al., "Ultra-thin film photodiodes for use in position sensors", J MOD OPT, 48(1), 2001, pp. 55-66

Abstract

A novel optical interferometer based on detecting the standing wave is realized by the newly developed ultra-thin film photodiode. The active layer of the ultra-thin film photodiode is thinner than half the wavelength of theincident light. Only a small part of the incident light is absorbed and the rest passes through the photodiode. This ultra-thin film photodiode can detect the intensity profile of the interference fringe of the standing wave, being inserted in the optical field. Taking advantage of this function, acompact interferometer having no reference arm is realized. The principle,design, fabrication, and performance as the displacement sensor are described. The signal obtained confirms the feasibility of this new interferometer. The displacement direction is also detected by a dual ultra-thin film photodiode with a phase shifter comparing the phases of the two signals.

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Documento generato il 30/09/20 alle ore 09:38:44