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Titolo:
High-rate deposition of LiNb1-xTaxO3 films by thermal plasma spray CVD
Autore:
Majima, T; Yamamoto, H; Kulinich, SA; Terashima, K;
Indirizzi:
Univ Tokyo, Grad Sch, Dept Met & Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo Tokyo Japan 1138656 Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo, Fac Engn, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo Tokyo Japan 1138656 Fac Engn, Bunkyo Ku, Tokyo 1138656, Japan
Titolo Testata:
JOURNAL OF CRYSTAL GROWTH
fascicolo: 3, volume: 220, anno: 2000,
pagine: 336 - 340
SICI:
0022-0248(200012)220:3<336:HDOLFB>2.0.ZU;2-G
Fonte:
ISI
Lingua:
ENG
Soggetto:
NIOBATE THIN-FILMS; CHEMICAL-VAPOR-DEPOSITION; LITHIUM-NIOBATE; EPITAXIAL-GROWTH; SAPPHIRE;
Keywords:
LiNb1-xTaxO3 films; thermal plasma spray CVD; high-rate deposition; sapphire substrate;
Tipo documento:
Letter
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
17
Recensione:
Indirizzi per estratti:
Indirizzo: Yamamoto, H Univ Tokyo, Grad Sch, Dept Met & Mat Sci, Bunkyo Ku, Hongo 7-3-1, Tokyo 1138656, Japan Univ Tokyo Hongo 7-3-1 Tokyo Japan 1138656 kyo 1138656, Japan
Citazione:
T. Majima et al., "High-rate deposition of LiNb1-xTaxO3 films by thermal plasma spray CVD", J CRYST GR, 220(3), 2000, pp. 336-340

Abstract

LiNb1-xTaxO3 films were prepared by a thermal plasma spray CVD method using liquid source materials. Preferentially (0 0 I)-oriented LiNb1-xTaxO3 films with satisfactory in-plane and out-of-plane alignment were fabricated onsapphire (0 0 1) substrates. The full-width at half-maximum (FWHM) of the (0 0 6) rocking curve could achieve 0.12 degrees, which was comparable withthose of LiNbO3 and LiTaO3 films prepared by other conventional vapor-phase deposition methods. The deposition rate was up to 0.07 mum/min, which was5-40 times faster than those for most other conventional vapor-phase deposition methods. From inductively coupled plasma atomic emission spectroscopyanalysis, x values of these films were estimated to be 0.36-0.49. (C) 2000Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/09/20 alle ore 04:58:47