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Titolo:
Composition and thickness uniformity of chemical vapor deposited barium strontium titanate films on a patterned structure
Autore:
Lee, JH; Rhee, SW;
Indirizzi:
Pohang Univ Sci & Technol, Dept Chem Engn, Div Elect & Comp Engn, Lab Adv Mat Proc, Pohang 790784, South Korea Pohang Univ Sci & Technol Pohang South Korea 790784 790784, South Korea
Titolo Testata:
ELECTROCHEMICAL AND SOLID STATE LETTERS
fascicolo: 1, volume: 4, anno: 2001,
pagine: F1 - F2
SICI:
1099-0062(200101)4:1<F1:CATUOC>2.0.ZU;2-A
Fonte:
ISI
Lingua:
ENG
Soggetto:
THIN-FILMS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
7
Recensione:
Indirizzi per estratti:
Indirizzo: Lee, JH Pohang Univ Sci & Technol, Dept Chem Engn, Div Elect & Comp Engn, Lab Adv Mat Proc, Pohang 790784, South Korea Pohang Univ Sci & Technol Pohang South Korea 790784 South Korea
Citazione:
J.H. Lee e S.W. Rhee, "Composition and thickness uniformity of chemical vapor deposited barium strontium titanate films on a patterned structure", EL SOLID ST, 4(1), 2001, pp. F1-F2

Abstract

Step coverage and composition uniformity on a patterned structure were studied in the direct liquid injection metallorganic chemical deposition of barium strontium titanate film. When Ti(mpd)(tmhd)(2), (mpd is methylpentanediol), (tmhd is tetramethylheptanedionate) was used as a titanium source, titanium incorporation and deposition rate were determined by the surface reaction when the deposition temperature was lower than 480 degreesC and excess titanium source was used to reach the right composition of the film, especially at low deposition temperatures. In this case, the nonuniform distribution of Ti on a patterned structure was observed because, inside the trench, the mass-transfer rate became substantially lower. When Ti(dmae)(4) (dmae is dimethylaminoethoxide) was used, the deposition rate and Ti incorporation were determined by mass transfer and the Ti incorporation was uniform on the patterned surface. (C) 2000 The Electrochemical Society. S1099-0062(00)06-109-5. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/09/20 alle ore 13:21:19