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Titolo:
Artificially nanostructured Cu : Al2O3 films produced by pulsed laser deposition
Autore:
Serna, R; Afonso, CN; Ricolleau, C; Wang, Y; Zheng, Y; Gandais, M; Vickridge, I;
Indirizzi:
CSIC, Inst Opt, E-28006 Madrid, Spain CSIC Madrid Spain E-28006CSIC, Inst Opt, E-28006 Madrid, Spain Univ Paris 06, CNRS UMR 7590, Lab Mineral Cristallog, F-75252 Paris 5, France Univ Paris 06 Paris France 5 Mineral Cristallog, F-75252 Paris 5, France Univ Paris 07, CNRS UMR 7590, Lab Mineral Cristallog, F-75252 Paris 5, France Univ Paris 07 Paris France 5 Mineral Cristallog, F-75252 Paris 5, France Univ Paris 06, UMR 7588, Grp Phys Solides, F-75251 Paris 5, France Univ Paris 06 Paris France 5 , Grp Phys Solides, F-75251 Paris 5, France Univ Paris 07, UMR 7588, Grp Phys Solides, F-75251 Paris 5, France Univ Paris 07 Paris France 5 , Grp Phys Solides, F-75251 Paris 5, France
Titolo Testata:
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
fascicolo: 5, volume: 71, anno: 2000,
pagine: 583 - 586
SICI:
0947-8396(200011)71:5<583:ANC:AF>2.0.ZU;2-4
Fonte:
ISI
Lingua:
ENG
Soggetto:
MULTILAYER THIN-FILMS; GROWTH; COPPER; GLASS; IMPLANTATION; NUCLEATION; PARTICLES; INTERFACE; DIFFUSION; IONS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
30
Recensione:
Indirizzi per estratti:
Indirizzo: Serna, R CSIC, Inst Opt, Serrano 121, E-28006 Madrid, Spain CSIC Serrano 121 Madrid Spain E-28006 121, E-28006 Madrid, Spain
Citazione:
R. Serna et al., "Artificially nanostructured Cu : Al2O3 films produced by pulsed laser deposition", APPL PHYS A, 71(5), 2000, pp. 583-586

Abstract

The processes leading to the formation of Cu:Al2O3 composite films on Si (001) with a well defined nanostructure by alternate pulsed laser deposition(a-PLD) in vacuum are investigated. Alternately amorphous Al2O3 layers andCu nanocrystals nucleated on the Al2O3 surface are formed, according to the PLD sequence. The Al2O3 deposited on the Cu nanocrystals fills in the space between them until they are completely buried, and subsequently, a continuous dense layer with a very flat surface (within 1 nm) is developed. The nucleation process of the nanocrystals and their resulting oblate ellipsoidal shape are discussed in terms of the role of the energetic species involved in the PLD process and the metal-oxide interface energy.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 07/07/20 alle ore 21:31:16