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Titolo:
Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2 x 1: effects of hydrogenating-gas and thermal history
Autore:
Nakazawa, H; Suemitsu, M; Miyamoto, N;
Indirizzi:
Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ Sendai Miyagi Japan 9808577 Ku, Sendai, Miyagi 9808577, Japan Tohoku Gakuin Univ, Fac Engn, Tagajo, Miyagi 985, Japan Tohoku Gakuin Univ Tagajo Miyagi Japan 985 ngn, Tagajo, Miyagi 985, Japan
Titolo Testata:
SURFACE SCIENCE
fascicolo: 1-2, volume: 465, anno: 2000,
pagine: 177 - 185
SICI:
0039-6028(20001010)465:1-2<177:ROHPIT>2.0.ZU;2-N
Fonte:
ISI
Lingua:
ENG
Soggetto:
INTERNAL-STATE DISTRIBUTIONS; MOLECULAR-BEAM EPITAXY; MONOHYDRIDE PHASE; SURFACE; H-2; DECOMPOSITION; ADSORPTION; MECHANISM;
Keywords:
chemical vapor deposition; hydrogen atom; molecular beam epitaxy; silicon; surface diffusion; surface thermodynamics (including phase transitions); thermal desorption spectroscopy;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
23
Recensione:
Indirizzi per estratti:
Indirizzo: Nakazawa, H Tohoku Univ, Elect Commun Res Inst, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan Tohoku Univ 2-1-1 Katahira Sendai Miyagi Japan9808577 , Japan
Citazione:
H. Nakazawa et al., "Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2 x 1: effects of hydrogenating-gas and thermal history", SURF SCI, 465(1-2), 2000, pp. 177-185

Abstract

Hydrogen desorption kinetics from Si(100)-2x1:H has been systematically investigated using temperature-programmed desorption (TPD) on several hydrogenating gases and thermal conditions. As a result, the desorption kinetic order with the hydrogen coverage was found to increase in the order: atomic hydrogen <disilane <silane and room-temperature adsorption <high-temperatureadsorption <post-annealing. These variations in kinetic order, depicted asa TPD peak shift at low hydrogen coverages, are universally described witha single surface parameter, gamma (o), the fractional coverage of unpairedhydrogen atoms. Fitting with obtained TPD spectra demonstrates that gamma (o) is a delicate function of the hydrogenating gas and thermal history. (C) 2000 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 08/04/20 alle ore 08:58:06