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Titolo:
Roughness evolution of ion sputtered rotating InP surfaces: Pattern formation and scaling laws
Autore:
Frost, F; Schindler, A; Bigl, F;
Indirizzi:
Inst Oberflachenmodifizierung, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung Leipzig Germany D-04318 8 Leipzig, Germany
Titolo Testata:
PHYSICAL REVIEW LETTERS
fascicolo: 19, volume: 85, anno: 2000,
pagine: 4116 - 4119
SICI:
0031-9007(20001106)85:19<4116:REOISR>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
KURAMOTO-SIVASHINSKY EQUATION; INDUCED RIPPLE TOPOGRAPHY; ROUGHENING INSTABILITY; BOMBARDED INP; MORPHOLOGY; EROSION; ENERGY; GROWTH; SI; OXYGEN;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
32
Recensione:
Indirizzi per estratti:
Indirizzo: Frost, F Inst Oberflachenmodifizierung, Permoserstr 15, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung Permoserstr 15 Leipzig Germany D-04318
Citazione:
F. Frost et al., "Roughness evolution of ion sputtered rotating InP surfaces: Pattern formation and scaling laws", PHYS REV L, 85(19), 2000, pp. 4116-4119

Abstract

The topography evolution of simultaneously rotated and Ar+ ion sputtered InP surfaces was studied using scanning force microscopy. For certain sputter conditions, the formation of a highly regular hexagonal pattern of close-packed mounds was observed with a characteristic spatial wavelength which increases with sputter time t according to lambda similar to t(gamma) with gamma similar or equal to 0.26. Based on the analysis of the dynamic scalingbehavior of the surface roughness, the evolution of the surface topographywill be discussed within the limits of existing models for surface erosionby ion sputtering.

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Documento generato il 03/12/20 alle ore 12:21:14