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Titolo:
Preparation of boron-doped ZnO thin films by photo-atomic layer deposition
Autore:
Yamamoto, Y; Saito, K; Takahashi, K; Konagai, M;
Indirizzi:
Teikyo Univ Sci & Technol, Dept Elect & Informat Sci, Uenohara, Yamanashi 4090193, Japan Teikyo Univ Sci & Technol Uenohara Yamanashi Japan 4090193 4090193, Japan Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528552, Japan Tokyo Inst Technol Tokyo Japan 1528552 , Meguro Ku, Tokyo 1528552, Japan
Titolo Testata:
SOLAR ENERGY MATERIALS AND SOLAR CELLS
fascicolo: 1-4, volume: 65, anno: 2001,
pagine: 125 - 132
SICI:
0927-0248(200101)65:1-4<125:POBZTF>2.0.ZU;2-V
Fonte:
ISI
Lingua:
ENG
Keywords:
ZnO; photo-atomic layer deposition; transparent conductive oxide;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
3
Recensione:
Indirizzi per estratti:
Indirizzo: Yamamoto, Y Teikyo Univ Sci & Technol, Dept Elect & Informat Sci, 2525 Yatsusawa, Uenohara, Yamanashi 4090193, Japan Teikyo Univ Sci & Technol 2525 Yatsusawa Uenohara Yamanashi Japan 4090193
Citazione:
Y. Yamamoto et al., "Preparation of boron-doped ZnO thin films by photo-atomic layer deposition", SOL EN MAT, 65(1-4), 2001, pp. 125-132

Abstract

Low-resistivity and high-stability ZnO films were grown by photo-atomic layer deposition (photo-ALD) technique using boron as an n-type dopant. The effect of the UV-irradiation was quantitatively evaluated by controlling theintensity of the incident light. The growth mechanism of ZnO films under UV-irradiation was investigated by varying the UV-irradiation period. In addition to the UV-irradiation, n-type doping using B2H6 was carried out. By optimizing the introduction cycle of B2H6, the lowest resistivity of 6.9 x 10(-4) Ohm cm was obtained. Furthermore, ZnO films grown by photo-ALD exhibit excellent stability in the electrical properties under air exposure. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 29/03/20 alle ore 16:38:44