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Titolo:
Recent advances in defect characterization in 6H-SiC using Deep Level Transient Spectroscopy and Positron Annihilation Spectroscopy
Autore:
Ling, CC; Beling, CD; Gong, M; Chen, XD; Fung, S;
Indirizzi:
Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China Univ HongKong Hong Kong Hong Kong Peoples R China Kong, Peoples R China Sichuan Univ, Dept Phys, Chengdu 610064, Sichuan, Peoples R China Sichuan Univ Chengdu Sichuan Peoples R China 610064 huan, Peoples R China
Titolo Testata:
DEFECTS AND DIFFUSION IN SEMICONDUCTORS
, volume: 183-1, anno: 2000,
pagine: 1 - 23
SICI:
1012-0386(2000)183-1:<1:RAIDCI>2.0.ZU;2-2
Fonte:
ISI
Lingua:
ENG
Soggetto:
VACANCY-TYPE DEFECTS; ELECTRON-IRRADIATED SILICON; LIFETIME SPECTROSCOPY; CARBIDE; IMPLANTATION; 6H; CENTERS; BEAM; ALUMINUM; TRAPS;
Keywords:
DLTS; PAS; silicon carbide; defects; electron irradiation; ion implantation;
Tipo documento:
Review
Natura:
Collana
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
98
Recensione:
Indirizzi per estratti:
Indirizzo: Ling, CC Univ Hong Kong, Dept Phys, Pokfulam Rd, Hong Kong, Hong Kong, Peoples R China Univ Hong Kong Pokfulam Rd Hong Kong Hong Kong Peoples R China a
Citazione:
C.C. Ling et al., "Recent advances in defect characterization in 6H-SiC using Deep Level Transient Spectroscopy and Positron Annihilation Spectroscopy", DEFECT DIFF, 183-1, 2000, pp. 1-23

Abstract

Deep Level Transient Spectroscopy and Positron Annihilation Spectroscopy are two major techniques currently used in studying point defects in 6H-SiC. These techniques are briefly described. A review of studies on as grown, electron-irradiated and ion-implanted 6H-SiC is made. Studies employing DeepLevel Transient Spectroscopy are considered first followed by those employing Positron Annihilation Spectroscopy. Finally some general conclusions are drawn regarding what has been learnt in recent years from information gained by both techniques.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/09/20 alle ore 20:16:41