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Titolo:
Theoretical relation between spatial resolution and efficiency of detection in scanning hot electron microscope
Autore:
Sakai, N; Furuya, K; Zhang, BY; Karasawa, S;
Indirizzi:
Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1538552, Japan Tokyo Inst Technol Tokyo Japan 1538552 , Meguro Ku, Tokyo 1538552, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 9A, volume: 39, anno: 2000,
pagine: 5256 - 5260
SICI:
0021-4922(200009)39:9A<5256:TRBSRA>2.0.ZU;2-D
Fonte:
ISI
Lingua:
ENG
Keywords:
hot electron; scanning probe microscope; sphere-plane model; image charge potential; tunnel transmission; SPM resolution; simulation; efficiency;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
8
Recensione:
Indirizzi per estratti:
Indirizzo: Sakai, N Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, 2-12-1 Ookayama, Tokyo 1538552, Japan Tokyo Inst Technol 2-12-1 Ookayama Tokyo Japan 1538552 52, Japan
Citazione:
N. Sakai et al., "Theoretical relation between spatial resolution and efficiency of detection in scanning hot electron microscope", JPN J A P 1, 39(9A), 2000, pp. 5256-5260

Abstract

To observe the spatial distribution of subsurface hot electrons (HEs) witha scanning probe, the relation between the spatial resolution and the hot electron current is investigated theoretically and the efficiency of HE detection is discussed. Using a sphere-plane model for the tip and the sample surface in a scanning hot electron microscope (SHEM), the electrostatic potential and the tunnel transmission are analyzed using the three-dimensional(3D) image charge method and quantum mechanical analysis, respectively, tosimulate HE detection. The resolution and the hot electron current depend on the hot electron energy and the tip-sample space and are related. The efficiency of HE detection is defined and its dependence on the parameters isexamined. For a given hot electron energy, the resolution is determined bythe minimum hot electron current which is larger than the noise current.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/04/20 alle ore 19:48:46