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Titolo:
Photoelectron signal simulation from textured overlayer samples
Autore:
Vutova, K; Mladenov, G; Tanaka, T; Kawabata, K;
Indirizzi:
Bulgarian Acad Sci, Inst Elect, Lab Electron Beam Technol, BU-1784 Sofia, Bulgaria Bulgarian Acad Sci Sofia Bulgaria BU-1784 chnol, BU-1784 Sofia, Bulgaria Hiroshima Inst Technol, Dept Elect, Hiroshima, Japan Hiroshima Inst Technol Hiroshima Japan ol, Dept Elect, Hiroshima, Japan
Titolo Testata:
SURFACE AND INTERFACE ANALYSIS
fascicolo: 1, volume: 30, anno: 2000,
pagine: 552 - 556
SICI:
0142-2421(200008)30:1<552:PSSFTO>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Soggetto:
SURFACE-ROUGHNESS; XPS; THICKNESS; ANGLE;
Keywords:
x-ray photoelectron spectra (XPS); XPS angular intensity distribution; textured sample surface; thin film; shadowing effect; mathematical model;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
10
Recensione:
Indirizzi per estratti:
Indirizzo: Vutova, K Bulgarian Acad Sci, Inst Elect, Lab Electron Beam Technol, 72 TzarigradskoShosse, BU-1784 Sofia, Bulgaria Bulgarian Acad Sci 72 Tzarigradsko Shosse Sofia Bulgaria BU-1784
Citazione:
K. Vutova et al., "Photoelectron signal simulation from textured overlayer samples", SURF INT AN, 30(1), 2000, pp. 552-556

Abstract

In this paper we propose a mathematical model for calculating XPS intensity distribution from a textured sample surface covered with a thin film. Thesurface roughness is approximated using triangular prisms, Analytical expressions for XPS intensity calculation are given. The results show that the XPS signals vary significantly in the cases of thin overlayers and high values of the prism slope angle. This model is useful when evaluating the surface roughness together with the film thickness, Copyright (C) 2000 John Wiley & Sons, Ltd.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 11/07/20 alle ore 17:20:01