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Titolo:
Characterization of thin-film devices for gas sensing
Autore:
Kaciulis, S; Mattogno, G;
Indirizzi:
CNR, Inst Mat Chem, I-00016 Monterotondo, Scalo, Italy CNR Monterotondo Scalo Italy I-00016 , I-00016 Monterotondo, Scalo, Italy
Titolo Testata:
SURFACE AND INTERFACE ANALYSIS
fascicolo: 1, volume: 30, anno: 2000,
pagine: 502 - 506
SICI:
0142-2421(200008)30:1<502:COTDFG>2.0.ZU;2-#
Fonte:
ISI
Lingua:
ENG
Soggetto:
METAL-FILMS; SNOX FILMS; SENSORS; CU; CHEMISTRY; SPECTRA; LAYERS; OXIDES;
Keywords:
surface analysis; depth profiling; gas sensor; multilayer structure; metal oxide; phthalocyanine;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
29
Recensione:
Indirizzi per estratti:
Indirizzo: Kaciulis, S CNR, Inst Mat Chem, POB 10, I-00016 Monterotondo, Scalo, ItalyCNR POB 10 Monterotondo Scalo Italy I-00016 ondo, Scalo, Italy
Citazione:
S. Kaciulis e G. Mattogno, "Characterization of thin-film devices for gas sensing", SURF INT AN, 30(1), 2000, pp. 502-506

Abstract

In this report are summarized the results of our investigations of gas sensors, based on thin films of metal oxides and multilayer structures, carried out by using surface analysis techniques during the last few years, For the studies of surface chemical composition and its variation in depth, the following experimental techniques have been employed: XPS, selected-area XPS depth profiling, scanning Auger-microscopy (SAM) and SIMS, The morphologyof the sensors was investigated by means of SERI and scanning tunnelling microscopy (STM), Most of the devices investigated in our work were based onthin films of polycrystalline tin oxide, doped or surface-activated with diverse metals (Pt, Au, Cu, Ag, etc.). In addition, the thin films of mixed Ti-W oxides with very promising gas-sensing characteristics were analysed. A new family of multilayer devices consisting of one or more ultrathin metal films (Pt, Au, Mo, Ni, etc.) and a top layer of tin oxide was also examined. Another type of multilayer structure with interesting gas-sensing parameters was based on an ultrathin film of Pt covered with titanium bis-phthalocyaninate. The experimental cases of surface analysis and optimization of different types of gas sensors are discussed, revealing the main uncertainties in preparation technology and emphasizing the benefits of surface-sensitive techniques for this application. Copyright (C) 2000 John Wiley & Sons, Ltd.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 29/11/20 alle ore 10:23:53