Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Effect of the magnetic mirror field on the ion energy distributions in a radio frequency plasma
Autore:
Liu, HX; Wei, HL; Liu, ZL; Liu, YH; Wang, JZ;
Indirizzi:
Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China Huazhong Univ Sci & Technol Wuhan Peoples R China 430074 Peoples R China
Titolo Testata:
ACTA PHYSICA SINICA
fascicolo: 9, volume: 49, anno: 2000,
pagine: 1764 - 1768
SICI:
1000-3290(200009)49:9<1764:EOTMMF>2.0.ZU;2-M
Fonte:
ISI
Lingua:
CHI
Soggetto:
BOMBARDMENT;
Keywords:
magnetic mirror field; glow discharge; low-temperature plasma; ion energy distribution;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
9
Recensione:
Indirizzi per estratti:
Indirizzo: Liu, HX Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China Huazhong Univ Sci & Technol Wuhan Peoples R China 430074 R China
Citazione:
H.X. Liu et al., "Effect of the magnetic mirror field on the ion energy distributions in a radio frequency plasma", ACT PHY C E, 49(9), 2000, pp. 1764-1768

Abstract

In this article, using the retarding grid energy analyzer, we have measured the ion energy distributions in a low temperature radio fruquency plasma under the condition of different magnetic mirror parameters. At the centre of discharge cell, the ion energy distributions displace in the direction of low energy with the increase of the magnetic density without evident variation in the ion energy distribution width. With the increase of the magnetic mirror ratio, the ion energy distribution displaces in the direction of high energy, and the width of ion energy distribution became wider. So the magnetic mirror parameters have significant effect on the ion energy distributions.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 02/04/20 alle ore 13:07:41