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Titolo:
Development of a versatile atomic force microscope within a scanning electron microscope
Autore:
Fukushima, K; Saya, D; Kawakatsu, H;
Indirizzi:
Univ Tokyo, Inst Ind Sci, Minato Ku, Tokyo 1068558, Japan Univ Tokyo Tokyo Japan 1068558 Ind Sci, Minato Ku, Tokyo 1068558, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 6B, volume: 39, anno: 2000,
pagine: 3747 - 3749
SICI:
0021-4922(200006)39:6B<3747:DOAVAF>2.0.ZU;2-7
Fonte:
ISI
Lingua:
ENG
Soggetto:
TUNNELING MICROSCOPE; DEVICES;
Keywords:
atomic force microscope; scanning electron microscope;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
11
Recensione:
Indirizzi per estratti:
Indirizzo: Fukushima, K Univ Tokyo, Inst Ind Sci, Minato Ku, 7-22-1 Roppongi, Tokyo 1068558, Japan Univ Tokyo 7-22-1 Roppongi Tokyo Japan 1068558 068558, Japan
Citazione:
K. Fukushima et al., "Development of a versatile atomic force microscope within a scanning electron microscope", JPN J A P 1, 39(6B), 2000, pp. 3747-3749

Abstract

We have developed a new versatile scanning electron microscope (SEM)-atomic force microscope (AFM) system capable of simultaneous SEM and AFM operation. The system consists of a SEM and a detachable AFM module that can be taken outside of the SEM chamber. By keeping the height of AFM module to lessthan 36 mm: and the AFM tip 5 mm below the highest point of the AFM module, clear SEM image and variable viewing angle are achieved. The AFM utilizesthe conventional optical lever method. The sample stage of the AFM module is equipped with remote controlled piezoelectric actuators enabling three degree-of-freedom positioning with sub-nanometer resolution and millimeter range. The optical lever path can also be modified by remote control after the module is placed within the SEM. The SEM-AFM system can also be used as a tool for micro scale processing and manipulation by replacing the cantilever with a designated probe.

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Documento generato il 21/09/20 alle ore 06:21:38