Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Investigation of SiO2 layers by glow discharge optical emission spectroscopy including layer thickness determination by an optical interference effect
Autore:
Dorka, R; Kunze, R; Hoffmann, V;
Indirizzi:
Inst Solid State & Mat Res Dresden, D-01171 Dresden, Germany Inst Solid State & Mat Res Dresden Dresden Germany D-01171 sden, Germany
Titolo Testata:
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
fascicolo: 7, volume: 15, anno: 2000,
pagine: 873 - 876
SICI:
0267-9477(2000)15:7<873:IOSLBG>2.0.ZU;2-H
Fonte:
ISI
Lingua:
ENG
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
5
Recensione:
Indirizzi per estratti:
Indirizzo: Hoffmann, V Inst Solid State & Mat Res Dresden, POB 270016, D-01171 Dresden, Germany Inst Solid State & Mat Res Dresden POB 270016 Dresden Germany D-01171
Citazione:
R. Dorka et al., "Investigation of SiO2 layers by glow discharge optical emission spectroscopy including layer thickness determination by an optical interference effect", J ANAL ATOM, 15(7), 2000, pp. 873-876

Abstract

When analysing transparent layers on reflecting substrates, the effect of interference causes intensity oscillations of certain spectral lines in glow discharge optical emission spectroscopy (GD-OES). As well as the chemicalinformation that can be obtained from GD-OES depth profiles, this effect provides additional information for the determination either of layer thickness or of refractive index. Chemical characterisation and layer thickness determination were carried out on SiO2 layers deposited by different methodsusing GD-OES. In some cases the calculated layer thickness was compared with data gained by ellipsometry. The results of layer thickness determination using the emission lines of Si at 288 nm and Ar at 416 nm, obtained at a homogeneous thermally oxidised silicon wafer, show the present state of theart of accuracy and precision of this analytical method.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 30/11/20 alle ore 00:30:17