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Titolo:
Simulation of the influence of the filament arrangement on the gas phase during hot filament chemical vapor deposition of diamond films
Autore:
Song, GH; Sun, C; Huang, RF; Wen, LS;
Indirizzi:
Chinese Acad Sci, Met Res Inst, Shenyang 110015, Peoples R China Chinese Acad Sci Shenyang Peoples R China 110015 110015, Peoples R China Shenyang Polytech Univ, Dept Mat Engn, Shenyang 110026, Peoples R China Shenyang Polytech Univ Shenyang Peoples R China 110026 , Peoples R China
Titolo Testata:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
fascicolo: 3, volume: 18, anno: 2000,
pagine: 860 - 863
SICI:
0734-2101(200005/06)18:3<860:SOTIOT>2.0.ZU;2-A
Fonte:
ISI
Lingua:
ENG
Soggetto:
AMORPHOUS-CARBON; GROWTH; FLOW; MODEL;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
--discip_EC--
Citazioni:
16
Recensione:
Indirizzi per estratti:
Indirizzo: Wen, LS Chinese Acad Sci, Met Res Inst, Shenyang 110015, Peoples R China Chinese Acad Sci Shenyang Peoples R China 110015 Peoples R China
Citazione:
G.H. Song et al., "Simulation of the influence of the filament arrangement on the gas phase during hot filament chemical vapor deposition of diamond films", J VAC SCI A, 18(3), 2000, pp. 860-863

Abstract

The uniform temperature and mass current density of gas in deposition regions of films were very important to obtain uniform diamond films over a large area during hot filament chemical vapor deposition. The simulation showed that the two physical parameters of gas in the chamber varied as a function of space and were influenced by the arrangement of the filaments and theinitial rate of the introduced gas. Regions of uniform temperature and mass current density existed in the chamber. The distributions of temperature and mass current density did not vary with the filament diameter. However, the value of the two physical parameters increased and declined with the increment of the diameter, respectively. An optimum distance between filaments was necessary to obtain uniform films over a large area. The mass currentdensity increased with the initial rate of the introduced gas. These results might provide a basis for optimizing the technological parameters to obtain uniform diamond films over a large area. (C) 2000 American Vacuum Society. [S0734-2101(00)03703-9].

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Documento generato il 24/10/20 alle ore 13:33:51