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Titolo:
HYDROGEN DESORPTION FROM ION-ROUGHENED SI(100)
Autore:
HESS G; RUSSELL M; GONG B; PARKINSON P; EKERDT JG;
Indirizzi:
UNIV TEXAS,DEPT CHEM ENGN,SCI & TECHNOL CTR FILM GROWTH & ANAL ELECT MAT AUSTIN TX 78712
Titolo Testata:
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
fascicolo: 3, volume: 15, anno: 1997,
parte:, 2
pagine: 1129 - 1134
SICI:
0734-2101(1997)15:3<1129:HDFIS>2.0.ZU;2-2
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL VAPOR-DEPOSITION; ENERGY-LOSS-SPECTROSCOPY; H-2 DESORPTION; MONOHYDRIDE PHASE; ATOMIC-HYDROGEN; SURFACE; ADSORPTION; KINETICS; SILICON; MECHANISM;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
35
Recensione:
Indirizzi per estratti:
Citazione:
G. Hess et al., "HYDROGEN DESORPTION FROM ION-ROUGHENED SI(100)", Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1129-1134

Abstract

Low energy Kr+ ions were used to create rough Si(100) surfaces. Hydrogen adsorption and desorption on these surfaces were studied using high resolution electron energy loss spectroscopy (HREELS) and temperature programmed desorption (TPD). A comparison of hydrogen TPD data from smooth and ion-roughened Si(100) surfaces showed no significant shift for the dihydride and monohydride related desorption features, revealing that ion impact roughening does not change the activation barriers for hydrogen desorption. In contrast to smooth Si(100), HREELS spectrafrom rough Si(100) surfaces with different hydrogen coverages showed a dihydride scissor mode at 0.8 ML and dihydride desorption below monolayer coverage in the corresponding TPD experiment. The vibrational spectra of hydrogen covered rough surfaces generally showed a smaller ratio of the scissor mode/bending mode intensity than the smooth Si(100)surfaces, suggesting a lower dihydride/monohydride coverage ratio. The corresponding TPD results on the other hand showed increased dihydride desorption and higher total coverages up to 2 ML. Although different dihydride units on terrace sites and at edge sites could not be unambiguously identified in the vibrational spectra, they provide a reasonable explanation for this inconsistency. (C) 1997 American Vacuum Society.

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Documento generato il 02/12/20 alle ore 17:50:18