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Titolo:
Three-dimensional microfabrication by use of single-photon-absorbed polymerization
Autore:
Maruo, S; Ikuta, K;
Indirizzi:
Nagoya Univ, Grad Sch Engn, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan Nagoya Univ Nagoya Aichi Japan 4648603 a Ku, Nagoya, Aichi 4648603, Japan
Titolo Testata:
APPLIED PHYSICS LETTERS
fascicolo: 19, volume: 76, anno: 2000,
pagine: 2656 - 2658
SICI:
0003-6951(20000508)76:19<2656:TMBUOS>2.0.ZU;2-M
Fonte:
ISI
Lingua:
ENG
Soggetto:
3-DIMENSIONAL MICROFABRICATION; PHOTOPOLYMERIZATION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
16
Recensione:
Indirizzi per estratti:
Indirizzo: Maruo, S Nagoya Univ, Grad Sch Engn, Dept Micro Syst Engn, Chikusa Ku, Furo Cho, Nagoya, Aichi 4648603, Japan Nagoya Univ Furo Cho Nagoya Aichi Japan4648603 hi 4648603, Japan
Citazione:
S. Maruo e K. Ikuta, "Three-dimensional microfabrication by use of single-photon-absorbed polymerization", APPL PHYS L, 76(19), 2000, pp. 2656-2658

Abstract

We developed a promising method to fabricate three-dimensional microstructures by using single-photon-absorbed polymerization confined to the vicinity of a tightly focused spot. This localized polymerization is based on the nonlinear response of the photopolymerizable resin to optical intensity with sufficiently low exposure. The nonlinear response was verified by measuring polymerization exotherm at different light intensities. The proposed method enables us to make even movable microstructures without any of the supporting parts or sacrificial layers normally required with conventional micromachining. In the experiment reported here, we fabricated a microgear withan external diameter of 47 mu m and an attached shaft. (C) 2000 American Institute of Physics. [S0003-6951(00)02319-6].

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 18/01/20 alle ore 13:12:32