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Titolo: Optical properties of SiC investigated by spectroscopic ellipsometry from 3.5 to 10 eV
Autore: Cobet, C; Wilmers, K; Wethkamp, T; Edwards, NV; Esser, N; Richter, W;
- Indirizzi:
- Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany Tech Univ Berlin Berlin Germany D-10623 perphys, D-10623 Berlin, Germany Max Planck Inst Festkorperforsch, D-7000 Stuttgart, Germany Max Planck Inst Festkorperforsch Stuttgart Germany D-7000 tgart, Germany Linkoping Univ, IFM Materiefys, Linkoping, Sweden Linkoping Univ Linkoping Sweden Univ, IFM Materiefys, Linkoping, Sweden
- Titolo Testata:
- THIN SOLID FILMS
fascicolo: 1-2,
volume: 364,
anno: 2000,
pagine: 111 - 113
- SICI:
- 0040-6090(20000327)364:1-2<111:OPOSIB>2.0.ZU;2-Q
- Fonte:
- ISI
- Lingua:
- ENG
- Soggetto:
- BAND-STRUCTURE; POLYTYPES; CARBIDE;
- Keywords:
- dielectric function; optical properties; SiC; spectroscopic ellipsometry;
- Tipo documento:
- Article
- Natura:
- Periodico
- Settore Disciplinare:
- Physical, Chemical & Earth Sciences
- Engineering, Computing & Technology
- Citazioni:
- 16
- Recensione:
- Indirizzi per estratti:
- Indirizzo: Cobet, C Tech Univ Berlin, Inst Festkorperphys, Hardenbergstr 36, D-10623 Berlin, Germany Tech Univ Berlin Hardenbergstr 36 Berlin Germany D-10623 Germany
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- Citazione:
- C. Cobet et al., "Optical properties of SiC investigated by spectroscopic ellipsometry from 3.5 to 10 eV", THIN SOL FI, 364(1-2), 2000, pp. 111-113
Abstract
In this work, we present the dielectric function of hexagonal 4H- and 6H-SiC polytypes as well as the cubic 3C-SiC polytype in the energy range from 3.5 to 10 eV measured by spectroscopic ellipsometry. We operated with synchrotron radiation at the Berlin electron storage ring BESSY I. Additionally the samples were investigated by atomic force microscopy to correct the measured dielectric function for the influence of surface roughness. The experimental results are compared to theoretical calculations. (C) 2000 ElsevierScience S.A. All rights reserved.
ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 18/01/21 alle ore 15:36:12