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Titolo:
Comparison between standard and near-field cathodoluminescence
Autore:
Heiderhoff, R; Sergeev, OV; Liu, YY; Phang, JCH; Balk, LJ;
Indirizzi:
Natl Univ Singapore, Ctr Integrated Circuit Failure Anal & Realibil, Fac Engn, Singapore 119260, Singapore Natl Univ Singapore Singapore Singapore 119260 ngapore 119260, Singapore Belaruss State Univ Informat & Radioelect, Dept Microelect, Minsk 220027, Byelarus Belaruss State Univ Informat & Radioelect Minsk Byelarus 220027 Byelarus Berg Univ Gesamthsch Wuppertal, Lehrstuhl Elekt, D-42097 Wuppertal, Germany Berg Univ Gesamthsch Wuppertal Wuppertal Germany D-42097 pertal, Germany
Titolo Testata:
JOURNAL OF CRYSTAL GROWTH
fascicolo: 1-3, volume: 210, anno: 2000,
pagine: 303 - 306
SICI:
0022-0248(200003)210:1-3<303:CBSANC>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Soggetto:
MICROSCOPY;
Keywords:
cathodoluminescence; SNOM; SPM; near-field;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
14
Recensione:
Indirizzi per estratti:
Indirizzo: Heiderhoff, R Natl Univ Singapore, Ctr Integrated Circuit Failure Anal & Realibil, Fac Engn, 10 Kent Ridge Crescent, Singapore 119260, Singapore NatlUniv Singapore 10 Kent Ridge Crescent Singapore Singapore 119260
Citazione:
R. Heiderhoff et al., "Comparison between standard and near-field cathodoluminescence", J CRYST GR, 210(1-3), 2000, pp. 303-306

Abstract

High-resolution near-field cathodoluminescence (NF-CL) investigations wereperformed using a scanning near-field optical microscope/scanning electronmicroscope hybrid system. It has been demonstrated that structures that are not detectable with standard CL are now observable under near-field conditions. In this presentation, we would like to compare SEM-CL and the new NF-CL with respect to future failure analyses. The advantages and disadvantages of both techniques will be illustrated and discussed. (C) 2000 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/06/20 alle ore 23:39:28