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Titolo:
RF frequency effects on molecular fragmentation
Autore:
Manolache, S; Sarfaty, M; Denes, F;
Indirizzi:
Univ Wisconsin, Ctr Plasma Aided Mfg, Madison, WI 53706 USA Univ Wisconsin Madison WI USA 53706 asma Aided Mfg, Madison, WI 53706 USA Appl Mat Inc, Santa Clara, CA 95054 USA Appl Mat Inc Santa Clara CA USA 95054 Mat Inc, Santa Clara, CA 95054 USA
Titolo Testata:
PLASMA SOURCES SCIENCE & TECHNOLOGY
fascicolo: 1, volume: 9, anno: 2000,
pagine: 37 - 44
SICI:
0963-0252(200002)9:1<37:RFEOMF>2.0.ZU;2-H
Fonte:
ISI
Lingua:
ENG
Soggetto:
OPTICAL-EMISSION ACTINOMETRY; THIN-FILM DEPOSITION; EXCITATION-FREQUENCY; GLOW-DISCHARGES; PLASMA; SI; MICROWAVE; MHZ;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
20
Recensione:
Indirizzi per estratti:
Indirizzo: Manolache, S Univ Wisconsin, Ctr Plasma Aided Mfg, Madison, WI 53706 USA Univ Wisconsin Madison WI USA 53706 g, Madison, WI 53706 USA
Citazione:
S. Manolache et al., "RF frequency effects on molecular fragmentation", PLASMA SOUR, 9(1), 2000, pp. 37-44

Abstract

The chlorine contents of 40 kHz and 13.56 MHz RF silicontetrachloride and dichlorosilane plasmas were investigated using actinometric evaluation in aparallel-plate (stainless-steel disk electrodes, stainless-steel reactor) electrode and in an electrodeless (external electrodes and glass reactor) discharges, in the 50-500 W RF power and 100-500 mTorr pressure ranges. It was found that the frequency has a significant effect on the molecular fragmentation of dichlorosilane and a less important effect on the fragmentationof silicontetrachloride. This behaviour was related to the molecular structures of the two starting components. The plasma-induced surface chemistries and morphology changes were also investigated and related to the different chemistries driven under 40 kHz and 13.56 MHz frequency environments. Plasma-induced and frequency-controlled molecular fragmentation reactions can be envisaged based on these findings.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 11/07/20 alle ore 03:07:51