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Titolo:
LOCAL EXPRESS SCANNING CHARACTERIZATION OF CRYSTAL PARAMETERS OF A SEMICONDUCTOR SURFACE AND BULK SIMULTANEOUSLY BY MEANS OF 2ND-HARMONIC GENERATION
Autore:
BALANYUK VV; DVORETSKY SA; FEDOROV AA; LIBERMAN VI; MUSHER SL; RUBENCHIK AM; RYABCHENKO VE; STUPAK MF; SYSKIN VS;
Indirizzi:
RUSSIAN ACAD SCI,INST AUTOMAT & ELECTROMETRY NOVOSIBIRSK 630090 RUSSIA RUSSIAN ACAD SCI,INST AUTOMAT & ELECTROMETRY NOVOSIBIRSK 630090 RUSSIA RUSSIAN ACAD SCI,INST SEMICOND PHYS NOVOSIBIRSK 630090 RUSSIA
Titolo Testata:
Materials science & engineering. B, Solid-state materials for advanced technology
fascicolo: 1-3, volume: 44, anno: 1997,
pagine: 168 - 172
SICI:
0921-5107(1997)44:1-3<168:LESCOC>2.0.ZU;2-H
Fonte:
ISI
Lingua:
ENG
Keywords:
YAP-ND LASER; SURFACE LAYER QUALITY; SEMICONDUCTOR PLATE; SEMICONDUCTOR FILM; 2ND-HARMONIC GENERATION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
7
Recensione:
Indirizzi per estratti:
Citazione:
V.V. Balanyuk et al., "LOCAL EXPRESS SCANNING CHARACTERIZATION OF CRYSTAL PARAMETERS OF A SEMICONDUCTOR SURFACE AND BULK SIMULTANEOUSLY BY MEANS OF 2ND-HARMONIC GENERATION", Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 168-172

Abstract

Generation of transmitted second harmonic radiation has been shown tobe a fast and convenient technique for the determination of local crystal quality of semiconductor plates and films. This 'transmission scheme' makes it possible to get precise information about the surface layer of a sample. A computer controlled unit based on a YAP:Nd laser isdescribed. Local orientation could be measured easily with a spatial resolution of up to 50 mu m over 20 s. Scanning of a 40 x 40 mm surface map takes about 10 min. (C) 1997 Elsevier Science S.A.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 21/09/20 alle ore 12:26:56