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Titolo:
THE EFFECT OF ULTRASONIC VIBRATION ON CVD DIAMOND NUCLEATION
Autore:
KENJI KH; YOSHII M; FRIEDBACHER G; GRASSERBAUER M;
Indirizzi:
TOKYO DENKI UNIV,FAC SCI & ENGN,DEPT APPL ELECT ENGN HATOYAMA SAITAMA35003 JAPAN VIENNA TECH UNIV,INST ANALYT CHEM A-1060 VIENNA AUSTRIA
Titolo Testata:
DIAMOND AND RELATED MATERIALS
fascicolo: 8, volume: 6, anno: 1997,
pagine: 1031 - 1035
SICI:
0925-9635(1997)6:8<1031:TEOUVO>2.0.ZU;2-D
Fonte:
ISI
Lingua:
ENG
Soggetto:
ATOMIC-FORCE MICROSCOPY; DEPOSITION; FILMS; TEMPERATURE; SUBSTRATE; GROWTH;
Keywords:
DIAMOND NUCLEATION; NUCLEATION TIME; RAMAN SPECTROSCOPY; ULTRASONIC VIBRATION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
12
Recensione:
Indirizzi per estratti:
Citazione:
K.H. Kenji et al., "THE EFFECT OF ULTRASONIC VIBRATION ON CVD DIAMOND NUCLEATION", DIAMOND AND RELATED MATERIALS, 6(8), 1997, pp. 1031-1035

Abstract

Nucleation and subsequent growth of chemical vapor deposition (CVD) diamond particles on silicon substrates under ultrasonic vibration havebeen investigated by scanning electron microscopy (SEM), atomic forcemicroscopy (AFM) and Raman spectroscopy. The diamond nucleation density with the ultrasonic vibration was higher than without vibration. AFM observations showed that, in the initial phase, growth on vibrated substrates leads to rougher surface than conventional growth. At lower substrate temperature diamond particles could only be grown under ultrasonic vibration. Raman spectra revealed that the quality of diamonds grown on vibrated substrates at low substrate temperature is comparable to that of diamonds produced at normal conditions. (C) 1997 ElsevierScience S.A.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/09/20 alle ore 22:41:42