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Titolo:
Stress and surface studies of SILAR grown CdS thin films on GaAs(100)
Autore:
Tamulevicius, S; Valkonen, MP; Laukaitis, G; Lindroos, S; Leskela, M;
Indirizzi:
Kaunas Univ Technol, Dept Phys, LT-3031 Kaunas, Lithuania Kaunas Univ Technol Kaunas Lithuania LT-3031 , LT-3031 Kaunas, Lithuania Univ Helsinki, Dept Chem, FIN-00014 Helsinki, Finland Univ Helsinki Helsinki Finland FIN-00014 em, FIN-00014 Helsinki, Finland
Titolo Testata:
THIN SOLID FILMS
, volume: 356, anno: 1999,
pagine: 430 - 434
SICI:
0040-6090(199911)356:<430:SASSOS>2.0.ZU;2-U
Fonte:
ISI
Lingua:
ENG
Soggetto:
IONIC LAYER ADSORPTION; ATOMIC-FORCE MICROSCOPY; ZNS; EPITAXY; STRAIN;
Keywords:
thin films; residual stress; growth mode;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
23
Recensione:
Indirizzi per estratti:
Indirizzo: Tamulevicius, S Kaunas Univ Technol, Dept Phys, Studentu 50, LT-3031 Kaunas, Lithuania Kaunas Univ Technol Studentu 50 Kaunas Lithuania LT-3031
Citazione:
S. Tamulevicius et al., "Stress and surface studies of SILAR grown CdS thin films on GaAs(100)", THIN SOL FI, 356, 1999, pp. 430-434

Abstract

Cadmium sulfide thin films were grown on GaAs (100) by the successive ionic layer adsorption and reaction (SILAR) technique from aqueous precursor solutions. The purpose of this work was to analyze and find stress dependenceof CdS thin films thickness and growth mode. The stress of the thin films was characterized by means of laser interferometry, composition and morphology by electron spectroscopy for chemical analysis (ESCA) and by atomic force microscopy (AFM). Correlation between the growth mode and the residual stress level is demonstrated. The changes from three-dimensional to two-dimensional growth of the film results in the change from tensile to compressive residual stress (from 1.39 to -2.50) x 10(9) N/m(2). (C) 1999 Elsevier Science S.A. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 05/07/20 alle ore 07:33:15