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Titolo:
Target for a Pb(Zr,Ti)O-3 thin film deposited at a low temperature using aquasi-metallic mode of reactive sputtering
Autore:
Kim, JD; Kawagoe, S; Sasaki, K; Hata, T;
Indirizzi:
Kanazawa Univ, Dept Elect & Comp Engn, Kanazawa, Ishikawa 9208667, Japan Kanazawa Univ Kanazawa Ishikawa Japan 9208667 wa, Ishikawa 9208667, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 12A, volume: 38, anno: 1999,
pagine: 6882 - 6886
SICI:
0021-4922(199912)38:12A<6882:TFAPTF>2.0.ZU;2-O
Fonte:
ISI
Lingua:
ENG
Keywords:
composite; powder and mixture targets; ferroelectric PZT thin film; quasi-metallic mode reactive sputtering; low temperature; high deposition rate;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
9
Recensione:
Indirizzi per estratti:
Indirizzo: Kim, JD Kanazawa Univ, Dept Elect & Comp Engn, 2-40-20 Kodatsuno, Kanazawa, Ishikawa 9208667, Japan Kanazawa Univ 2-40-20 Kodatsuno Kanazawa IshikawaJapan 9208667 an
Citazione:
J.D. Kim et al., "Target for a Pb(Zr,Ti)O-3 thin film deposited at a low temperature using aquasi-metallic mode of reactive sputtering", JPN J A P 1, 38(12A), 1999, pp. 6882-6886

Abstract

Using a (ZrTi + PbO) composite target in the quasi-metallic mode reactive sputtering (QMMRS) system, perovskite Pb(Zr,Ti)O-3 films were deposited at a rate of 8 nm/min at the substrate temperature of 450 degrees C. X-ray diffraction analysis of a film deposited at a substrate temperature of 450 degrees C and with O-2/Ar = 2.1%, using a powder target with a stoichiometric composition of PZT of Pb : Ti : Zr = 1 : 0.5 : 0.5, revealed that it had almost the same crystal structure as that of a film produced using a (ZrTi + 30% PbO) composite target. The deposition rate was 3 nm/min. To fabricate PZT thin films at a high deposition rate using QMMRS, a (Pb + ZrO2 + Ti) mixture target was prepared. Although it is possible to produce a film with a high deposition rate at 450 degrees C, perovskite PZT film could not be obtained. This may be due to differences in sputtering yield for Zr and ZrO2 atoms or in the heat of formation of PbO and ZrO2 molecules. A new solid target that is free from thr problems associated with the (Pb + ZrO2 + Ti) mixture target is currently bring developed.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 26/09/20 alle ore 05:05:19