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Titolo:
Evolution of the electron energy distribution function in a planar inductive argon discharge
Autore:
Seo, SH; Kim, SS; Hong, JI; Chang, CS; Chang, HY;
Indirizzi:
Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 5701, South Korea
Titolo Testata:
APPLIED PHYSICS LETTERS
fascicolo: 2, volume: 76, anno: 2000,
pagine: 149 - 151
SICI:
0003-6951(20000110)76:2<149:EOTEED>2.0.ZU;2-5
Fonte:
ISI
Lingua:
ENG
Soggetto:
COUPLED PLASMA DISCHARGE;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
17
Recensione:
Indirizzi per estratti:
Indirizzo: Seo, SH Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 uth Korea
Citazione:
S.H. Seo et al., "Evolution of the electron energy distribution function in a planar inductive argon discharge", APPL PHYS L, 76(2), 2000, pp. 149-151

Abstract

The evolution of the electron energy distribution function (EEDF) over a pressure range of 5-100 mTorr is investigated in a planar inductive argon discharge. It is found that the EEDF, which appears to be a bi-Maxwellian distribution with a two-temperature structure at low pressures, evolves into aDruyvesteyn-like distribution as the pressure increases. The electron energy diffusion coefficient, which describes electron heating, is calculated under the same discharge conditions using discharge parameters and numericalresults show that the heating of low-energy electrons is enhanced as the pressure increases resulting in a transition of the EEDF to a Druyvesteyn distribution. (C) 2000 American Institute of Physics. [S0003-6951(00)03202-2].

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Documento generato il 30/11/20 alle ore 19:49:10