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Titolo:
Polyimide coating on non-planar microelectronic devices: characterization of vacuum drying effects by a new 'flip-paste' back-etching method
Autore:
Sidorov, V; Shai, A; Ritter, D; Paz, Y;
Indirizzi:
Technion Israel Inst Technol, Dept Chem Engn, IL-32000 Haifa, Israel Technion Israel Inst Technol Haifa Israel IL-32000 L-32000 Haifa, Israel Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel Technion Israel Inst Technol Haifa Israel IL-32000 L-32000 Haifa, Israel
Titolo Testata:
SURFACE & COATINGS TECHNOLOGY
fascicolo: 2-3, volume: 122, anno: 1999,
pagine: 214 - 218
SICI:
0257-8972(199912)122:2-3<214:PCONMD>2.0.ZU;2-3
Fonte:
ISI
Lingua:
ENG
Keywords:
coating flip-paste; heterojunction bipolar transistor; non-planar technology; polyimide; undercut;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
9
Recensione:
Indirizzi per estratti:
Indirizzo: Paz, Y Technion Israel Inst Technol, Dept Chem Engn, IL-32000 Haifa, Israel Technion Israel Inst Technol Haifa Israel IL-32000 Haifa, Israel
Citazione:
V. Sidorov et al., "Polyimide coating on non-planar microelectronic devices: characterization of vacuum drying effects by a new 'flip-paste' back-etching method", SURF COAT, 122(2-3), 1999, pp. 214-218

Abstract

Many microelectronic devices are non-planar structures with a complex three-dimensional geometry that includes steps and cavities. The reliability ofthe electrical properties of such devices depends heavily on good contact and adhesion between the encapsulating coating and the device surface. Nevertheless, characterization of the coating/device boundary is often a difficult task. A new method for direct visualization of the internal surface of a polymer (polyimide in this case), coated on an InP-InGaAs heterojunction bipolar transistor (HBT), was used. This method is based on etching the whole device, leaving a shell of polyimide for subsequent probing by microscopy (optical, scanning electron or any other). The polymer surface was compared with that of the NET, thus demonstrating the non-perfect filling of horizontal cavities. Replacing thermal drying of the polymer solution film witha vacuum-drying step was found to be very effective in overcoming this problem. (C) 1999 Elsevier Science S.A. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 02/12/20 alle ore 15:16:18