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Titolo:
Thickness effect of constituent layers on gas sensitivity in SnO2[metal]/metal multi-layers
Autore:
Galdikas, A; Kaciulis, S; Mattogno, G; Mironas, A; Napoli, A; Senuliene, D; Setkus, A;
Indirizzi:
Inst Semicond Phys, LT-2600 Vilnius, Lithuania Inst Semicond Phys Vilnius Lithuania LT-2600 LT-2600 Vilnius, Lithuania CNR, Inst Mat Chem, I-00016 Monterotondo, Italy CNR Monterotondo Italy I-00016 nst Mat Chem, I-00016 Monterotondo, Italy
Titolo Testata:
SENSORS AND ACTUATORS B-CHEMICAL
fascicolo: 1-3, volume: 58, anno: 1999,
pagine: 478 - 485
SICI:
0925-4005(19990921)58:1-3<478:TEOCLO>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
SURFACE OXIDATION-REDUCTION; THIN METAL-FILMS; SENSORS; SILICON; CO;
Keywords:
gas sensors; thin films; resistance response; metals; tin dioxide;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
17
Recensione:
Indirizzi per estratti:
Indirizzo: Setkus, A Inst Semicond Phys, A Gostauto 11, LT-2600 Vilnius, Lithuania Inst Semicond Phys A Gostauto 11 Vilnius Lithuania LT-2600 ania
Citazione:
A. Galdikas et al., "Thickness effect of constituent layers on gas sensitivity in SnO2[metal]/metal multi-layers", SENS ACTU-B, 58(1-3), 1999, pp. 478-485

Abstract

The multi-layer sensors based on the SnO2/[metal]/metal thin layers are produced and investigated at temperatures from 20 degrees C to 300 degrees C in clean and contaminated air (CO, H-2, NOx). Various metals Pt, Au, Mo andNi were used for the layer at the bottom of the sensor. Thickness of the constituent layers is varied and the electrical resistance and the X-ray photoelectron spectroscopy (XPS) depth profiles are measured. It is determinedthat the resistance response to gases is dependent on the thickness of each of the constituent layers. The response signal was set to maximum by an optimal thickness of the top- and bottom-layers. The selectivity to gas was changed by the metallic inter-layer grown in the interface between the top-and bottom-layers up to appropriate thickness. The metallic character of the conductance in the base film is associated with a unique response to gasin the sensors tested. (C) 1999 Elsevier Science S.A. All rights reserved.

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Documento generato il 30/11/20 alle ore 00:27:11