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Titolo:
Hydrodynamic model of wave-ordered structures formed by ion bombardment ofsolids
Autore:
Rudy, AS; Smirnov, VK;
Indirizzi:
Russian Acad Sci, Inst Microelect, Moscow 150007, Russia Russian Acad SciMoscow Russia 150007 Microelect, Moscow 150007, Russia
Titolo Testata:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
fascicolo: 1-2, volume: 159, anno: 1999,
pagine: 52 - 59
SICI:
0168-583X(199910)159:1-2<52:HMOWSF>2.0.ZU;2-6
Fonte:
ISI
Lingua:
ENG
Soggetto:
RIPPLE FORMATION; ROUGHENING INSTABILITY; TOPOGRAPHY DEVELOPMENT; SAMPLE ROTATION; YIELD CHANGE; SURFACE; SILICON; GAAS; SI; RELAXATION;
Keywords:
wave-ordered structure; ion-bombardment; Newtonian fluid; capillary constant; supercriticality;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
24
Recensione:
Indirizzi per estratti:
Indirizzo: Rudy, AS Yaroslavl State Univ, Sovetskaya St 14, Yaroslavl 150000, Russia Yaroslavl State Univ Sovetskaya St 14 Yaroslavl Russia 150000 ia
Citazione:
A.S. Rudy e V.K. Smirnov, "Hydrodynamic model of wave-ordered structures formed by ion bombardment ofsolids", NUCL INST B, 159(1-2), 1999, pp. 52-59

Abstract

The model of a wave-ordered structures (WOS) formed by ion-bombardment on a surfaces of amorphous materials is put forward. The model is based on theassumption that amorphous layer under ion-bombardment may be considered asNewtonian fluid on a hard substrate in the field of external force. Withinthis approach the mathematical model of an amorphous layer is formulated as a boundary value problem for Navier-Stokes and continuity equations for incompressible liquid. Analysis of the problem results in two quasi-stationary spatial-periodic solutions governed by two control parameters: one of them a(perpendicular to) is a capillary constant under a vertical ion beam incidence, normalized to layer thickness, another is an angle of incidence Theta. In the general case a capillary constant a(perpendicular to)(L, Theta)is a convex function of both variables viz. normalized spatial-period L and an angle of incidence Theta. With energy E-0 = 9 keV this function exhibits a local maximum at L = 1.77, Theta = 50.4 degrees which is already global a(perpendicular to c) = 0.375 when E-0 = 5 keV and (as judged by indirectmeasurements) becomes more convex with further energy reduction. Collationof a(perpendicular to)(L, Theta) with experimental data reveals that the observed maximum value of capillary constant a(perpendicular to)(ob) = 0.367, which due to an inherent supercriticality is a little bit lower than a(perpendicular to c), falls at Theta = 55 degrees, i.e., with energy diminution angular range should contract to this point. This outcome is consistent with our experimental results on Ni-2(+)-Si system, manifesting that angularrange reduces to a small vicinity of Theta(c)(in) = 55 degrees when ion energy tends to minimum energy of WOS formation E-0 = 1.5 keV. (C) 1999 Elsevier Science B.V. All rights reserved.

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Documento generato il 03/12/20 alle ore 05:45:30