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Titolo: Hydrodynamic model of waveordered structures formed by ion bombardment ofsolids
Autore: Rudy, AS; Smirnov, VK;
 Indirizzi:
 Russian Acad Sci, Inst Microelect, Moscow 150007, Russia Russian Acad SciMoscow Russia 150007 Microelect, Moscow 150007, Russia
 Titolo Testata:
 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION BBEAM INTERACTIONS WITH MATERIALS AND ATOMS
fascicolo: 12,
volume: 159,
anno: 1999,
pagine: 52  59
 SICI:
 0168583X(199910)159:12<52:HMOWSF>2.0.ZU;26
 Fonte:
 ISI
 Lingua:
 ENG
 Soggetto:
 RIPPLE FORMATION; ROUGHENING INSTABILITY; TOPOGRAPHY DEVELOPMENT; SAMPLE ROTATION; YIELD CHANGE; SURFACE; SILICON; GAAS; SI; RELAXATION;
 Keywords:
 waveordered structure; ionbombardment; Newtonian fluid; capillary constant; supercriticality;
 Tipo documento:
 Article
 Natura:
 Periodico
 Settore Disciplinare:
 Physical, Chemical & Earth Sciences
 Engineering, Computing & Technology
 Citazioni:
 24
 Recensione:
 Indirizzi per estratti:
 Indirizzo: Rudy, AS Yaroslavl State Univ, Sovetskaya St 14, Yaroslavl 150000, Russia Yaroslavl State Univ Sovetskaya St 14 Yaroslavl Russia 150000 ia



 Citazione:
 A.S. Rudy e V.K. Smirnov, "Hydrodynamic model of waveordered structures formed by ion bombardment ofsolids", NUCL INST B, 159(12), 1999, pp. 5259
Abstract
The model of a waveordered structures (WOS) formed by ionbombardment on a surfaces of amorphous materials is put forward. The model is based on theassumption that amorphous layer under ionbombardment may be considered asNewtonian fluid on a hard substrate in the field of external force. Withinthis approach the mathematical model of an amorphous layer is formulated as a boundary value problem for NavierStokes and continuity equations for incompressible liquid. Analysis of the problem results in two quasistationary spatialperiodic solutions governed by two control parameters: one of them a(perpendicular to) is a capillary constant under a vertical ion beam incidence, normalized to layer thickness, another is an angle of incidence Theta. In the general case a capillary constant a(perpendicular to)(L, Theta)is a convex function of both variables viz. normalized spatialperiod L and an angle of incidence Theta. With energy E0 = 9 keV this function exhibits a local maximum at L = 1.77, Theta = 50.4 degrees which is already global a(perpendicular to c) = 0.375 when E0 = 5 keV and (as judged by indirectmeasurements) becomes more convex with further energy reduction. Collationof a(perpendicular to)(L, Theta) with experimental data reveals that the observed maximum value of capillary constant a(perpendicular to)(ob) = 0.367, which due to an inherent supercriticality is a little bit lower than a(perpendicular to c), falls at Theta = 55 degrees, i.e., with energy diminution angular range should contract to this point. This outcome is consistent with our experimental results on Ni2(+)Si system, manifesting that angularrange reduces to a small vicinity of Theta(c)(in) = 55 degrees when ion energy tends to minimum energy of WOS formation E0 = 1.5 keV. (C) 1999 Elsevier Science B.V. All rights reserved.
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Documento generato il 03/12/20 alle ore 05:45:30