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Titolo:
Electron cyclotron resonance plasma produced with a closed spheroidal electron cyclotron resonance surface in a simple cusp field
Autore:
Uchida, M; Fukumoto, S; Asakawa, M; Tanaka, H; Maekawa, T; Terumichi, Y;
Indirizzi:
Kyoto Univ, Grad Sch Energy Sci, Dept Fundamental Energy Sci, Kyoto 6068224, Japan Kyoto Univ Kyoto Japan 6068224 damental Energy Sci, Kyoto 6068224, Japan Kyoto Univ, Grad Sch Sci, Dept Phys, Kyoto 6068224, Japan Kyoto Univ Kyoto Japan 6068224 Sch Sci, Dept Phys, Kyoto 6068224, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
fascicolo: 8A, volume: 38, anno: 1999,
pagine: L885 - L887
SICI:
0021-4922(19990801)38:8A<L885:ECRPPW>2.0.ZU;2-S
Fonte:
ISI
Lingua:
ENG
Keywords:
ECR plasma; cusp; plasma production; ECR spheroid; suprathermal electron;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
7
Recensione:
Indirizzi per estratti:
Indirizzo: Uchida, M Kyoto Univ, Grad Sch Energy Sci, Dept Fundamental Energy Sci, Kyoto 6068224, Japan Kyoto Univ Kyoto Japan 6068224 nergy Sci, Kyoto 6068224, Japan
Citazione:
M. Uchida et al., "Electron cyclotron resonance plasma produced with a closed spheroidal electron cyclotron resonance surface in a simple cusp field", JPN J A P 2, 38(8A), 1999, pp. L885-L887

Abstract

With a spheroidal electron cyclotron resonance (ECR) surface completely enclosed in a vacuum vessel in a simple cusp field, we can produce ECR plasmas with a peak electron density up to n(e) similar or equal to 5 x 10(11) cm(-3) at a low Ar pressure of p similar or equal to 1.5 x 10(-5) Torr by injection of 2.45 GHz microwave power of P-in = 150-400 W. The degree of ionization reaches over 50% at this local density peak point. Such a high degreeof ionization may be due to the efficient ionization by suprathermal tail electrons (W > 30 eV), which are observed in single probe characteristics. On the other hand, at a relatively high pressure of p similar or equal to 1.5 x 10(-4) Torr, a flat density profile with density nearly equal to the plasma cutoff density (7 x 10(10) cm(-3)) is obtained inside the ECR spheroid.

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Documento generato il 25/01/20 alle ore 06:31:32