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Titolo:
Diamond deposition and behavior of atomic carbon species in a low-pressureinductively coupled plasma
Autore:
Ito, K; Teii, K; Ishikawa, M; Ito, M; Hori, M; Takeo, T; Kato, T; Goto, T;
Indirizzi:
Nagoya Municipal Ind Res Inst, Atsuta Ku, Nagoya, Aichi 4560058, Japan Nagoya Municipal Ind Res Inst Nagoya Aichi Japan 4560058 i 4560058, Japan Nagoya Univ, Dept Quantum Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan Nagoya Univ Nagoya Aichi Japan 4648603 a Ku, Nagoya, Aichi 4648603, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 7B, volume: 38, anno: 1999,
pagine: 4504 - 4507
SICI:
0021-4922(199907)38:7B<4504:DDABOA>2.0.ZU;2-D
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; MICROWAVE PLASMA; DENSITY; GROWTH;
Keywords:
diamond deposition; C-atom density vacuum ultraviolet absorption spectroscopy; inductively coupled plasma.; carbon hollow cathode lamp;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
16
Recensione:
Indirizzi per estratti:
Indirizzo: Ito, K Nagoya Municipal Ind Res Inst, Atsuta Ku, 4-41 3 Chome,Rokuban, Nagoya, Aichi 4560058, Japan Nagoya Municipal Ind Res Inst 4-41 3 Chome,Rokuban Nagoya Aichi Japan 4560058
Citazione:
K. Ito et al., "Diamond deposition and behavior of atomic carbon species in a low-pressureinductively coupled plasma", JPN J A P 1, 38(7B), 1999, pp. 4504-4507

Abstract

Diamond was successfully synthesized by using H-2-rich CH4/CO/H-2 and Hi-rich CH4/H-2 inductively coupled plasmas at a pressure of 11 Pa. The ratio of particle size to deposition time, as a criterion of the diamond growth rate, in H-2-rich CH4/CO/H-2 mixture gas plasmas was higher than that in H-2-rich CH4/H-2 mixture gas plasmas. The deposits in H-2-rich CH4/H-2 and H-2-rich CH4/CO/H-2 mixture gas plasmas were found to contain nondiamond phases, as confirmed by Roman spectroscopy, in order to investigate the mechanisminvolved in diamond formation, C-atom densities in the plasmas were measured by vacuum ultraviolet absorption spectroscopy with a carbon hollow cathode lamp. In addition, CH, OH and H-atom emission intensities were measured by optical emission spectroscopy. As a result, it was found that the C-atomdensities increased considerably with increasing mixture ratio of CO to CH4. On the basis of the correlation between the duality of deposits and the C-atom densities, C-atoms were determined to probably contribute to the formation of nondiamond phases in the deposits.

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Documento generato il 30/09/20 alle ore 05:42:10