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Titolo:
ALD precursor chemistry: Evolution and future challenges
Autore:
Leskela, M; Ritala, M;
Indirizzi:
Univ Helsinki, Dept Chem, Helsinki 00014, Finland Univ Helsinki HelsinkiFinland 00014 Dept Chem, Helsinki 00014, Finland
Titolo Testata:
JOURNAL DE PHYSIQUE IV
fascicolo: P8, volume: 9, anno: 1999,
parte:, 2
pagine: 837 - 852
SICI:
1155-4339(199909)9:P8<837:APCEAF>2.0.ZU;2-V
Fonte:
ISI
Lingua:
ENG
Soggetto:
ATOMIC-LAYER EPITAXY; CHEMICAL-VAPOR-DEPOSITION; OXIDE THIN-FILMS; BINARY REACTION SEQUENCE; IN-SITU; BETA-DIKETONATE; SURFACE-CHEMISTRY; GROWTH; TITANIUM; SILICON;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
110
Recensione:
Indirizzi per estratti:
Indirizzo: Leskela, M Univ Helsinki, Dept Chem, POB 55, Helsinki 00014, Finland Univ Helsinki POB 55 Helsinki Finland 00014 nki 00014, Finland
Citazione:
M. Leskela e M. Ritala, "ALD precursor chemistry: Evolution and future challenges", J PHYS IV, 9(P8), 1999, pp. 837-852

Abstract

The requirements of ALD precursors differ from those of CVD concerning thermal stability, adsorption on the surface, and reactions towards each other. In the first ALD experiments in the 70s elements (Zn, Cd, S), metal halides and non-metal hydrides (H2O, H2S) were used. In the 80s the selection ofprecursors widened to metal complexes (alkoxides, P-diketonates) and simple organometallics (alkyl compounds). In the 90s both new metal (Cp-compounds, alkylamides) as well as non-metal precursors (H2O2, O-3, hydrazine) havebeen introduced. A characteristic feature of ALD is that surface groups play an important role as reactive sites for tl-le next precursor pulse. The development of ALD precursors is limited by the small number of groups working in the field It seems, however, that the precuror development is diverged and tailored molecules are designed for each process.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/10/20 alle ore 16:08:30