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Titolo:
Characterisation of RF-sputtered platinum films from industrial productionplants using slow positrons
Autore:
Osipowicz, A; Harting, M; Hempel, M; Britton, DT; Bauer-Kugelmann, W; Trifthauser, W;
Indirizzi:
Fachhsch Fulda, Fak Elektrotech, D-36039 Fulda, Germany Fachhsch Fulda Fulda Germany D-36039 Elektrotech, D-36039 Fulda, Germany Univ Cape Town, Dept Phys, ZA-7701 Rondebosch, South Africa Univ Cape Town Rondebosch South Africa ZA-7701 Rondebosch, South Africa Univ Bundeswehr Munchen, Inst Nukl Festkorperphys, D-85577 Neubiberg, Germany Univ Bundeswehr Munchen Neubiberg Germany D-85577 577 Neubiberg, Germany
Titolo Testata:
APPLIED SURFACE SCIENCE
fascicolo: 1-4, volume: 149, anno: 1999,
pagine: 198 - 203
SICI:
0169-4332(199908)149:1-4<198:CORPFF>2.0.ZU;2-P
Fonte:
ISI
Lingua:
ENG
Keywords:
Pt thin films; positron lifetime; Doppler-broadening; industrial production;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
14
Recensione:
Indirizzi per estratti:
Indirizzo: Osipowicz, A Fachhsch Fulda, Fak Elektrotech, D-36039 Fulda, Germany Fachhsch Fulda Fulda Germany D-36039 D-36039 Fulda, Germany
Citazione:
A. Osipowicz et al., "Characterisation of RF-sputtered platinum films from industrial productionplants using slow positrons", APPL SURF S, 149(1-4), 1999, pp. 198-203

Abstract

Platinum films, used in thin film technology, produced by radio-frequency sputter deposition on aluminium oxide substrates under different conditions, have been studied by positron beam and other techniques, before and afterproduction annealing. The defect structure in the layers has been characterised using both positron Lifetime and Doppler-broadening spectroscopy, andcompared with X-ray studies of crystallinity and texture. (C) 1999 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 03/04/20 alle ore 03:59:35