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Titolo:
Properties of shear-horizontal surface acoustic waves in different layeredquartz-SiO2 structures
Autore:
Herrmann, F; Weihnacht, M; Buttgenbach, S;
Indirizzi:
Robert Bosch Gmbh, Dept K8, STZ1, D-72703 Reutlingen, Germany Robert BoschGmbh Reutlingen Germany D-72703 D-72703 Reutlingen, Germany Inst Solid State & Mat Res, D-01069 Dresden, Germany Inst Solid State & Mat Res Dresden Germany D-01069 1069 Dresden, Germany Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany Tech Univ Braunschweig Braunschweig Germany D-38106 raunschweig, Germany
Titolo Testata:
ULTRASONICS
fascicolo: 5, volume: 37, anno: 1999,
pagine: 335 - 341
SICI:
0041-624X(199906)37:5<335:POSSAW>2.0.ZU;2-2
Fonte:
ISI
Lingua:
ENG
Soggetto:
SENSORS; MODE; LIQUIDS;
Keywords:
coupling coefficient; effective dielectric constant; group velocity; love modes; phase velocity; temperature coefficients;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
19
Recensione:
Indirizzi per estratti:
Indirizzo: Herrmann, F Robert Bosch Gmbh, Dept K8, STZ1, POB 1342, D-72703 Reutlingen, Germany Robert Bosch Gmbh POB 1342 Reutlingen Germany D-72703 Germany
Citazione:
F. Herrmann et al., "Properties of shear-horizontal surface acoustic waves in different layeredquartz-SiO2 structures", ULTRASONICS, 37(5), 1999, pp. 335-341

Abstract

Acoustic wave devices based on waveguide modes with shear-horizontal polarisation in Y-rotated quartz plates are very promising for sensor application. Up to now, several systems have been reported based on standard ST-quartz. Those devices lack temperature stability, which is essential for field application. However, appropriate combinations of crystal cut angle and SiO2overlay thickness should provide temperature compensation. Thus, differentsystems based on Y-rotated quartz plates with cut angles between 30 and 42.75 degrees have been investigated. First- and second-order temperature coefficients of frequency change have been calculated and measured. Moreover, properties are compiled that are relevant for the device design, i.e. acoustoelectric coupling coefficients, effective dielectric constants, and phaseas well as group velocities. In summary, device configurations could be identified that combine temperature stability comparable to that of surface skimming bulk waves in the AT-cut, a suitable coupling coefficient, and highgravimetric sensitivity. (C) 1999 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/12/20 alle ore 08:48:03