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Titolo:
Suppression of corrosion phenomenon on Al-1 %Cu surface with fluorine treatment
Autore:
Kim, SG; Baek, KH; Kim, J; Koo, JG; Kim, DY; Kim, IS; Kwon, KH; Kim, CI;
Indirizzi:
Elect & Telecommun Res Inst, Appl Semicond Devices Res Dept, Taejon 305600, South Korea Elect & Telecommun Res Inst Taejon South Korea 305600 05600, South Korea Kyung Woon Univ, Dept Elect Engn, Kumi 730850, South Korea Kyung Woon Univ Kumi South Korea 730850 t Engn, Kumi 730850, South Korea Hanseo Univ, Dept Elect Engn, Chung Nam 356820, South Korea Hanseo Univ Chung Nam South Korea 356820 , Chung Nam 356820, South Korea Chungang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea Chungang Univ Seoul South Korea 156756 t Engn, Seoul 156756, South Korea
Titolo Testata:
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
, volume: 35, anno: 1999,
parte:, 2 supplemento:, S
pagine: S357 - S360
SICI:
0374-4884(199907)35:<S357:SOCPOA>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
MECHANISM; FILMS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
8
Recensione:
Indirizzi per estratti:
Indirizzo: Kim, SG Elect & Telecommun Res Inst, Appl Semicond Devices Res Dept, Taejon 305600, South Korea Elect & Telecommun Res Inst Taejon South Korea 305600 outh Korea
Citazione:
S.G. Kim et al., "Suppression of corrosion phenomenon on Al-1 %Cu surface with fluorine treatment", J KOR PHYS, 35, 1999, pp. S357-S360

Abstract

The corrosion phenomenon of Al-1 %Cu surfaces has been investigated after etching with a Cl-based plasma gas. The as-deposited surface of Al-1 %Cu contains large grain-boundary areas, and the corrosion progresses mainly at the grain boundaries due to the imperfect crystalline state. It is confirmedthat SFs plasma treatment at a pressure of the 300 mTorr after the etch process prevents the corrosion effectively. This is due not to the chlorine on the etched surface substituted for the fluorine atoms during SFs treatment, but to a passivation layer of fluorine-related compounds formed on the surface. The passivation layer prevents moisture penetration in to the SF6-treated surface and suppresses the corrosion successfully.

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Documento generato il 28/11/20 alle ore 03:50:30