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Titolo:
A silicon based nanometric oscillator for scanning force microcopy operating in the 100 MHz range
Autore:
Kawakatsu, H; Toshiyoshi, H; Saya, D; Fujita, H;
Indirizzi:
Univ Tokyo, Inst Ind Sci, Minato Ku, Tokyo 1068558, Japan Univ Tokyo Tokyo Japan 1068558 Ind Sci, Minato Ku, Tokyo 1068558, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 6B, volume: 38, anno: 1999,
pagine: 3962 - 3965
SICI:
0021-4922(199906)38:6B<3962:ASBNOF>2.0.ZU;2-H
Fonte:
ISI
Lingua:
ENG
Soggetto:
CANTILEVERS; MICROSCOPE;
Keywords:
scanning force microscopy; atomic force microscopy; non-contact; nanocantilever; nanometric oscillator;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
16
Recensione:
Indirizzi per estratti:
Indirizzo: Kawakatsu, H Univ Tokyo, Inst Ind Sci, Minato Ku, 7-22-1 Roppongi, Tokyo 1068558, Japan Univ Tokyo 7-22-1 Roppongi Tokyo Japan 1068558 068558, Japan
Citazione:
H. Kawakatsu et al., "A silicon based nanometric oscillator for scanning force microcopy operating in the 100 MHz range", JPN J A P 1, 38(6B), 1999, pp. 3962-3965

Abstract

The detectable force resolution of a mechanical oscillator used in scanning farce microscopy can be, improved by increasing its natural frequency f(o), quality factor Q, and by decreasing the spring constant k and the temperature of operation T. For an. oscillator having a structure that can be modeled as a concentrated mass-spring model, decreasing the mass of the oscillator is desirable, since high f(o) can then be obtained without increasing the spring constant k. We have developed a novel fabrication technique for a head-neck shaped nanometric oscillator by selective etching of a laminated silicon substrate known as SIMOX. The oscillator head or mass measures 60nm or 170 nm in thickness and 100 nm to 500 nm in, diameter, depending on the size of the mask The neck, which serves as art elastic support for the mass, measures 100 nm in length, The oscillator could be tailored to have its natural frequency in the range of 0.01 GHz to 0.5 GHz, and a spring constant between 10(-1) N/m and 10(2) N/m.

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Documento generato il 24/09/20 alle ore 23:43:41