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Titolo:
Emission microscope observation of FEAs
Autore:
Nakane, H; Yamane, K; Muto, Y; Kawata, S; Adachi, H;
Indirizzi:
Muroranapant Technol, Dept Elect & Elect Engn, Muroran, Hokkaido 0508585, J Muroran Inst Technol Muroran Hokkaido Japan 0508585 , Hokkaido 0508585, J
Titolo Testata:
APPLIED SURFACE SCIENCE
fascicolo: 1-4, volume: 146, anno: 1999,
pagine: 169 - 171
SICI:
0169-4332(199905)146:1-4<169:EMOOF>2.0.ZU;2-8
Fonte:
ISI
Lingua:
ENG
Keywords:
FEA; emission microscope;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
4
Recensione:
Indirizzi per estratti:
Indirizzo: Nakane, H MuroranHokkaidochnol, Dept Elect & Elect Engn, 27-1 Mizumoto Cho, Muroran, Muroran Inst Technol 27-1 Mizumoto Cho Muroran Hokkaido Japan 0508585
Citazione:
H. Nakane et al., "Emission microscope observation of FEAs", APPL SURF S, 146(1-4), 1999, pp. 169-171

Abstract

Electron emission from a FEA was magnified by making use of an emission microscope, and the uniformity of the electron emission was examined. By resolving the electron emission from the each microtip, the stability of electron emission from a single microtip was successfully measured. Magnificationfactors of 100 and spatial resolution of 6 mu m are achieved. The uniformity of the electron emission from the microtips depends on the uniformity ofmicrotip apex size. It also depends on the uniformity of geometrical arrangement of the gate electrode and microtip. The emission stabilities of individual microtips are different and the emitted electron current fluctuates like pulses. (C) 1999 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 06/04/20 alle ore 11:14:26