Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Observation of growth modes during metal-organic chemical vapor depositionof GaN
Autore:
Stephenson, GB; Eastman, JA; Thompson, C; Auciello, O; Thompson, LJ; Munkholm, A; Fini, P; DenBaars, SP; Speck, JS;
Indirizzi:
Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA Argonne Natl Lab Argonne IL USA 60439 Div Mat Sci, Argonne, IL 60439 USA Argonne Natl Lab, Div Chem, Argonne, IL 60439 USA Argonne Natl Lab Argonne IL USA 60439 ab, Div Chem, Argonne, IL 60439 USA Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA Univ CalifSanta Barbara Santa Barbara CA USA 93106 Barbara, CA 93106 USA
Titolo Testata:
APPLIED PHYSICS LETTERS
fascicolo: 22, volume: 74, anno: 1999,
pagine: 3326 - 3328
SICI:
0003-6951(19990531)74:22<3326:OOGMDM>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
MOLECULAR-BEAM EPITAXY; ENERGY ELECTRON-DIFFRACTION; X-RAY-SCATTERING; HIGH-QUALITY GAN; GALLIUM NITRIDE; FILM GROWTH; PHASE; OSCILLATIONS; NUCLEATION; AMMONIA;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
29
Recensione:
Indirizzi per estratti:
Indirizzo: Stephenson, GB Argonne Natl Lab, Div Mat Sci, 9700 S Cass Ave, Argonne, IL60439 USA Argonne Natl Lab 9700 S Cass Ave Argonne IL USA 60439 9 USA
Citazione:
G.B. Stephenson et al., "Observation of growth modes during metal-organic chemical vapor depositionof GaN", APPL PHYS L, 74(22), 1999, pp. 3326-3328

Abstract

We present real-time surface x-ray scattering measurements during homoepitaxial growth of GaN by metal-organic chemical vapor deposition. We observedintensity oscillations corresponding to the completion of each monolayer during layer-by-layer growth. The growth rate was found to be temperature independent and Ga-transport limited. Transitions between step-flow, layer-by-layer, and three-dimensional growth modes were determined as a function oftemperature and growth rate. (C) 1999 American Institute of Physics. [S0003-6951(99)01622-8].

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 19/09/20 alle ore 14:00:16