Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen
Autore:
Seo, SH; Hong, JI; Chang, HY;
Indirizzi:
Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 5701, South Korea
Titolo Testata:
APPLIED PHYSICS LETTERS
fascicolo: 19, volume: 74, anno: 1999,
pagine: 2776 - 2778
SICI:
0003-6951(19990510)74:19<2776:EEDFAP>2.0.ZU;2-9
Fonte:
ISI
Lingua:
ENG
Soggetto:
COUPLED PLASMA;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
14
Recensione:
Indirizzi per estratti:
Indirizzo: Seo, SH Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 uth Korea
Citazione:
S.H. Seo et al., "Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen", APPL PHYS L, 74(19), 1999, pp. 2776-2778

Abstract

Studies on electron heating are done during the power coupling change in the discharge mode transition (E-H mode transition) in a planar inductive argon discharge without electrostatic screen (Faraday shield). The electron energy distribution function (EEDF) evolution is measured by the alternatingcurrent superposition method with a radio frequency (rf) compensated Langmuir probe. The trend of its integrals, electron density and effective electron temperature, and especially the plasma potential against rf power are presented. It is demonstrated that the plasma potential is governed primarily by the high-energy electron tail in a plasma with bi-Maxwellian EEDF. Theinterdependence of the EEDF and the plasma potential is discussed. The experimental results show that the plasma potential against rf power reflects a change in the relative contribution of capacitive power coupling to electron heating. (C) 1999 American Institute of Physics. [S0003-6951(99)00719-6].

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 30/11/20 alle ore 18:35:32