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Titolo:
Crystalline and electrical characteristics of N-doped diamond films
Autore:
Jiang, N; Hatta, A; Ito, T;
Indirizzi:
Osaka Univ, Fac Engn, Dept Elect Engn, Suita, Osaka 565, Japan Osaka UnivSuita Osaka Japan 565 Dept Elect Engn, Suita, Osaka 565, Japan Kochi Univ Technol, Kochi 7828502, Japan Kochi Univ Technol Kochi Japan 7828502 niv Technol, Kochi 7828502, Japan
Titolo Testata:
DIAMOND FILMS AND TECHNOLOGY
fascicolo: 6, volume: 8, anno: 1998,
pagine: 457 - 466
SICI:
0917-4540(1998)8:6<457:CAECON>2.0.ZU;2-C
Fonte:
ISI
Lingua:
ENG
Soggetto:
NITROGEN;
Keywords:
diamond film; N-doping; surface resistance; surface conductive layer;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
13
Recensione:
Indirizzi per estratti:
Indirizzo: Jiang, N Univ Tokushima, Dept Elect Engn, Tokushima 7708056, Japan Univ Tokushima Tokushima Japan 7708056 Tokushima 7708056, Japan
Citazione:
N. Jiang et al., "Crystalline and electrical characteristics of N-doped diamond films", DIAM FILM T, 8(6), 1998, pp. 457-466

Abstract

Surface resistivity and crystallinity of N-doped diamond films have been investigated in the present study. A scanning electron microscopy study reveals that the morphology of diamond grains becomes mon and more hornlike with increasing N/C ratio in the source gases. The point defects including vacancies and nitrogen impurities are found to be present in larger amounts inthe near-surface region than in the bulk of the N-doped diamond films. Especially, it is found that the surface resistance of as-grown N-doped diamond films dramatically increases with the increasing N/C ratio: when the N/C ratio exceeds 5%, the surface resistance can reach as high as 10(11) Omega,which is about six orders of magnitude higher than that of undoped ones. The N-doped diamond films with high surface resistance are observed to stillpossess surface negative electron affinity, meaning that the surface negative electron affinity is not directly related to the surface conductivity.

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Documento generato il 06/04/20 alle ore 08:18:11