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Titolo:
DETERMINATION OF THE CUBIC TO HEXAGONAL FRACTION IN GAN NUCLEATION LAYERS USING GRAZING-INCIDENCE X-RAY-SCATTERING
Autore:
MUNKHOLM A; THOMPSON C; FOSTER CM; EASTMAN JA; AUCIELLO O; STEPHENSON GB; FINI P; DENBAARS SP; SPECK JS;
Indirizzi:
ARGONNE NATL LAB,DIV MAT SCI,9700 S CASS AVE ARGONNE IL 60439 UNIV CALIF SANTA BARBARA,DEPT MAT SANTA BARBARA CA 93106
Titolo Testata:
Applied physics letters
fascicolo: 23, volume: 72, anno: 1998,
pagine: 2972 - 2974
SICI:
0003-6951(1998)72:23<2972:DOTCTH>2.0.ZU;2-I
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; GROWN GAN; EVOLUTION; SAPPHIRE; FILMS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
18
Recensione:
Indirizzi per estratti:
Citazione:
A. Munkholm et al., "DETERMINATION OF THE CUBIC TO HEXAGONAL FRACTION IN GAN NUCLEATION LAYERS USING GRAZING-INCIDENCE X-RAY-SCATTERING", Applied physics letters, 72(23), 1998, pp. 2972-2974

Abstract

Recent electron diffraction and microscopy studies of GaN nucleation layers have shown that, faults in the stacking of the close-packed planes result in the coexistence of cubic and hexagonal phases within thelayers. Using grazing incidence x-ray scattering, we have quantified the proportion of the cubic and hexagonal phases throughout the nucleation layer. We compare the structure of a 20 nm nucleation layer grownon sapphire by atmospheric pressure metal-organic chemical vapor deposition at 525 degrees C to that of an identical layer heated to 1060 degrees C. The fractions of cubic and hexagonal phases in the layers are determined by a comparison of the scattering data with a Hendricks-Teller model. High temperature exposure results in a decrease of the cubic fraction from 0.56 to 0.17. The good agreement with. the Hendricks-Teller model indicates that the positions of the stacking faults are uncorrelated, (C) 1998 American Institute of Physics.

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Documento generato il 24/09/20 alle ore 01:43:31