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Titolo:
PD(II)-CATALYZED ADDITION POLYMERIZATION AND RING-OPENING METATHESIS POLYMERIZATION OF ALICYCLIC MONOMERS - ROUTES TO NEW MATRIX RESINS FOR193 NM PHOTOLITHOGRAPHY
Autore:
OKOROANYANWU U; SHIMOKAWA T; BYERS JD; WILLSON CG;
Indirizzi:
ADV MICRO DEVICES INC,1 AMD PL,POB 3453 M-S 78 SUNNYVALE CA 94088 UNIV TEXAS,DEPT CHEM AUSTIN TX 78712 SEMATECH AUSTIN TX 78741
Titolo Testata:
Journal of molecular catalysis. A, Chemical
fascicolo: 1-2, volume: 133, anno: 1998,
pagine: 93 - 114
SICI:
1381-1169(1998)133:1-2<93:PAPARM>2.0.ZU;2-P
Fonte:
ISI
Lingua:
ENG
Soggetto:
NORBORNENE DERIVATIVES; CATALYSTS; OLEFINS; POLYACETYLENE; PRECURSOR;
Keywords:
PD(II)-CATALYZED ADDITION POLYMERIZATION; RING OPENING METATHESIS POLYMERIZATION; ALICYCLIC MONOMERS; ALICYCLIC POLYMERS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
68
Recensione:
Indirizzi per estratti:
Citazione:
U. Okoroanyanwu et al., "PD(II)-CATALYZED ADDITION POLYMERIZATION AND RING-OPENING METATHESIS POLYMERIZATION OF ALICYCLIC MONOMERS - ROUTES TO NEW MATRIX RESINS FOR193 NM PHOTOLITHOGRAPHY", Journal of molecular catalysis. A, Chemical, 133(1-2), 1998, pp. 93-114

Abstract

A series of alicyclic polymers designed for 193 nm photoresist applications have been synthesized and characterized. These polymers were synthesized by Pd(II)-catalyzed addition and ring opening metathesis polymerization techniques. Methods for removing residual metal complexes of Pd(II) and Ir(IV) from alicyclic polymers were developed. The low absorbance of these polymers at 193 nm and their high dry etch resistance make them attractive candidates for 193 nm lithography. When formulated with onium-type photoacid generators and plasticizers in propylene glycol monomethyl ether acetate, these photoresists have demonstrated high resolution and high sensitivity. (C) 1998 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/12/20 alle ore 08:10:33