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Titolo:
CHARACTERISTICS AND EFFECTIVENESS OF A FOIL LENS FOR CORRECTION OF SPHERICAL-ABERRATION IN SCANNING-TRANSMISSION ELECTRON-MICROSCOPY
Autore:
HANAI T; YOSHIDA H; HIBINO M;
Indirizzi:
NAGOYA UNIV,SCH ENGN,DEPT ELECT NAGOYA AICHI 46401 JAPAN NAGOYA UNIV,CTR INTEGRATED RES SCI & ENGN NAGOYA AICHI 46401 JAPAN
Titolo Testata:
Journal of Electron Microscopy
fascicolo: 3, volume: 47, anno: 1998,
pagine: 185 - 192
SICI:
0022-0744(1998)47:3<185:CAEOAF>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
PROBE;
Keywords:
SPHERICAL ABERRATION CORRECTION; FOIL LENS; ELECTRON PROBE; SCANNING TRANSMISSION ELECTRON MICROSCOPY; PROBE-FORMING LENS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
18
Recensione:
Indirizzi per estratti:
Citazione:
T. Hanai et al., "CHARACTERISTICS AND EFFECTIVENESS OF A FOIL LENS FOR CORRECTION OF SPHERICAL-ABERRATION IN SCANNING-TRANSMISSION ELECTRON-MICROSCOPY", Journal of Electron Microscopy, 47(3), 1998, pp. 185-192

Abstract

A side-entry type foil lens was developed for correction of sphericalaberration of a probe-forming lens in a 200 kV scanning transmission electron microscope (STEM). Measurements of the spherical aberration coefficient and recording of STEM images were performed in parallel forvarious foil lens voltages. The measured third order spherical aberration coefficient of the probe-forming lens combined with the foil lensdecreased with increasing foil lens voltage and reached negative values at foil lens voltages higher than similar to 400 V. The quality of images observed at a large beam convergence semi-angle of 20 mad was improved correspondingly to the reduction of the spherical aberration coefficient. Under the condition of a constant probe current, the best image observed at the foil lens voltage of 350 V showed smaller blurring compared with the image observed without the foil lens at the optimum beam convergence semi-angle of 10 mrad.

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Documento generato il 07/04/20 alle ore 20:55:52