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Titolo:
IN-SITU POLING OF LITHIUM-NIOBATE FILMS ON SILICON-WAFER BY APPLYING A LOW ELECTRIC-FIELD DURING PULSED-LASER DEPOSITION
Autore:
GUO XL; HU WS; LIU ZG; ZHU SN; YU T; XIONG SB; LIN CY;
Indirizzi:
SEOUL NATL UNIV,DEPT PHYS SEOUL 151742 SOUTH KOREA NANJING UNIV,NATL LAB SOLID STATE MICROSTRUCT NANJING 210093 PEOPLES R CHINA NANJING UNIV,CTR MAT ANAL NANJING 210093 PEOPLES R CHINA
Titolo Testata:
Materials science & engineering. B, Solid-state materials for advanced technology
fascicolo: 3, volume: 53, anno: 1998,
pagine: 278 - 283
SICI:
0921-5107(1998)53:3<278:IPOLFO>2.0.ZU;2-0
Fonte:
ISI
Lingua:
ENG
Soggetto:
LINBO3 THIN-FILMS; FERROELECTRIC DOMAIN-STRUCTURES; BLUE 2ND-HARMONIC GENERATION; X-RAY-SCATTERING; WAVE-GUIDE; EPITAXIAL-GROWTH; ABLATION; SIO2; INTERFACE;
Keywords:
IN-SITU POLING; LITHIUM NIOBATE FILM; PULSED LASER DEPOSITION; SILICON WAFER;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
27
Recensione:
Indirizzi per estratti:
Citazione:
X.L. Guo et al., "IN-SITU POLING OF LITHIUM-NIOBATE FILMS ON SILICON-WAFER BY APPLYING A LOW ELECTRIC-FIELD DURING PULSED-LASER DEPOSITION", Materials science & engineering. B, Solid-state materials for advanced technology, 53(3), 1998, pp. 278-283

Abstract

Completely c-oriented LiNbO3 (LN) films have been fabricated on p-type Si(lll)wafer coated with SiO2 buffer by applying a low electric field of E-f=8 V cm(-1) during pulsed laser deposition (PLD). )(X-ray photoelectron spectroscopy (XPS) analysis indicates that the stoichiometry of the film is in good agreement with that of the bulk LN target materials. The crystal structure of the as-grown him is tested by X-ray diffraction (XRD) using a theta-2 theta scan. The surface of the LN film is smooth, dense and crack-free, no large droplets are observed by scanning electron microscope (SEM). The X-ray energy dispersive spectrometer (XREDS) analysis to the different area of cross-section of the LN film shows that there are no variation of composition with the depth. Favourable optical waveguiding properties of the films are demonstrated by a prism coupler method. (C) 1998 Elsevier Science S.A. All rightsreserved.

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Documento generato il 26/09/20 alle ore 11:57:11