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Titolo:
STRUCTURE, COMPOSITION AND TRIBOLOGICAL PROPERTIES OF CARBON NITRIDE FILMS
Autore:
CZYZNIEWSKI A; PRECHT W; PANCIELEJKO M; MYSLINSKI P; WALKOWIAK W;
Indirizzi:
TECH UNIV KOSZALIN,TECH TRANSFER CTR,RACLAWICKA 15 PL-75620 KOSZALIN POLAND TECH UNIV KOSZALIN,INST MAT SCI & TECHNOL PL-75620 KOSZALIN POLAND
Titolo Testata:
Thin solid films
fascicolo: 1-2, volume: 317, anno: 1998,
pagine: 384 - 387
SICI:
0040-6090(1998)317:1-2<384:SCATPO>2.0.ZU;2-O
Fonte:
ISI
Lingua:
ENG
Soggetto:
MECHANICAL-PROPERTIES; VAPOR-DEPOSITION; THIN-FILMS; ION;
Keywords:
GOOD ADHESION; AMORPHOUS STRUCTURE; TRIBOLOGICAL PROPERTIES; MICROHARDNESS; BALL-ON-DISC TRIBOTESTING;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
12
Recensione:
Indirizzi per estratti:
Citazione:
A. Czyzniewski et al., "STRUCTURE, COMPOSITION AND TRIBOLOGICAL PROPERTIES OF CARBON NITRIDE FILMS", Thin solid films, 317(1-2), 1998, pp. 384-387

Abstract

Carbon nitride (CNx) films were synthesized using reactive magnetron sputtering of a high purity graphite target under argon/nitrogen atmosphere using various substrates held at the temperature below 453 K. Typically, the films were grown at the rate of 0.025 mu m x min(-1) to obtain a total thickness of 2.0 mu m. The analyses of chemical composition made by Rutherford Backscattering Spectroscopy (RBS) and Energy Dispersive X-ray Analysis (EDAX) showed that the maximum amount of nitrogen introduced to the films is equal to 37 at.%. The Raman-spectra andAtomic Force Microscopy (AFM) analyses show that CNx films have an amorphous structure and replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrate. The hardness measurements showed microhardness of the films up to 22 GPa. Good adhesion (L-c > 80 N) was obtained after applying a metallic interlayer and a substrate bias voltage of -300 V d.c. The unlubricatedball-on-disc tribotesting of the CNx films showed that a friction coefficient against bearing steel was equal to 0.45 and good wear resistance was achieved for the sample made with a substrate bias voltage of -300 V d.c. The paper presents investigation results and a discussion regarding the influence of argon/nitrogen atmosphere composition and substrate bias voltage on the properties of CNx films. (C) 1998 Elsevier Science S.A.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 01/12/20 alle ore 13:22:08