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Titolo:
DETERMINATION OF INTERFACIAL ROUGHNESS AND ITS CORRELATION IN SPUTTERED COZR CU MULTILAYERS/
Autore:
LANGER J; MATTHEIS R; KRAUSSLICH J; SENZ S; HESSE D; SCHUHRKE T; ZWECK J;
Indirizzi:
IPHT JENA EV,POSTFACH 100 239 D-07702 JENA GERMANY UNIV JENA,IOQ D-07743 JENA GERMANY MAX PLANCK INST MIKROSTRUKTURPHYS D-06120 HALLE GERMANY UNIV REGENSBURG,INST EXPT & ANGEW PHYS D-93040 REGENSBURG GERMANY
Titolo Testata:
Thin solid films
fascicolo: 1-2, volume: 319, anno: 1998,
pagine: 187 - 190
SICI:
0040-6090(1998)319:1-2<187:DOIRAI>2.0.ZU;2-V
Fonte:
ISI
Lingua:
ENG
Soggetto:
X-RAY-DIFFRACTION; REFLECTION; SCATTERING;
Keywords:
X-RAY REFLECTOMETRY; HURST PARAMETER; INTERFACIAL ROUGHNESS; MULTILAYERS; ROOT MEAN SQUARE;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
10
Recensione:
Indirizzi per estratti:
Citazione:
J. Langer et al., "DETERMINATION OF INTERFACIAL ROUGHNESS AND ITS CORRELATION IN SPUTTERED COZR CU MULTILAYERS/", Thin solid films, 319(1-2), 1998, pp. 187-190

Abstract

We relate the information about interfacial roughness in multilayers obtained by X-ray reflectometry in the low angle regime to what can bedetermined from cross-section images taken in a transmission electronmicroscope (TEM). The interfacial root mean square (rms) roughness for each individual layer can be derived from X-ray reflectometry in specular geometry in Co/Cu multilayer systems. The results are both qualitatively and quantitatively in agreement with results obtained by evaluating cross-section TEM images. Utilising non-specular scans in X-rayreflectometry gives additional details about the growth structure. InCo1-xZrx/Cu multilayers we suggest to correlate the Hurst parameter to the grain structure determined by cross-sectional TEM. (C) 1998 Elsevier Science S.A.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 09/08/20 alle ore 22:52:43