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Titolo:
INTEGRATED MULTISENSOR CONTROL OF II-VI MBE FOR GROWTH OF COMPLEX IR DETECTOR STRUCTURES
Autore:
JENSEN JE; ROTH JA; BREWER PD; OLSON GL; DUBRAY JJ; WU OK; RAJAVEL RD; DELYON TJ;
Indirizzi:
HUGHES RES LABS MALIBU CA 90265
Titolo Testata:
Journal of electronic materials
fascicolo: 6, volume: 27, anno: 1998,
pagine: 494 - 499
SICI:
0361-5235(1998)27:6<494:IMCOIM>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
SPECTROSCOPY;
Keywords:
II-VI; INFRARED DETECTORS; MOLECULAR BEAM EPILAXY (MBE);
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
2
Recensione:
Indirizzi per estratti:
Citazione:
J.E. Jensen et al., "INTEGRATED MULTISENSOR CONTROL OF II-VI MBE FOR GROWTH OF COMPLEX IR DETECTOR STRUCTURES", Journal of electronic materials, 27(6), 1998, pp. 494-499

Abstract

Next-generation HgCdTe infrared detectors and detector arrays requirethe growth of multilayer heterojunction structures with precisely controlled alloy composition and doping levels and minimal defect densities. Molecular beam epitaxy (MBE) provides the ability to produce such structures. However, in the absence of a real-time, in situ, control methodology the extreme sensitivity of BgCdTe layer quality and doping efficiency on fundamental MBE variable such a substrate temperature and effusion cell flux provide serious challenges to the uniform and reproducible growth of such structures. In this paper, we describe an integrated, multi-sensor approach for monitoring and controlling the variables that are most important for MBE growth of HgCdTe device structures used in advanced multi-color infrared detectors and high speed, low-noise avalanche photodiodes. Substrate temperature, effusion cell flux, and layer composition are monitored using absorption-edge spectroscopy (ABES), optical flux monitoring (OFM), an spectroscopic ellipsometry (SE), respectively. Flexible, custom software has been developed and implemented for analysis of sensor inputs and feedback control of the MBE system in response to those inputs. The sensors and their application to growth of HgCdTe will be described, and the use of a custom software framework for data analysis and system control will be discussed.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 14/07/20 alle ore 19:20:07