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Titolo:
A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE
Autore:
SANCHEZ S; ELWENSPOEK M; GUI CQ; DENIVELLE MJME; DEVRIES R; DEKORTE PAJ; BRUIJN MP; WIJNBERGEN JJ; MICHALKE W; STEINBEISS E; HEIDENBLUT T; SCHWIERZI B;
Indirizzi:
UNIV TWENTE,MESA RES INST NL-7500 AE ENSCHEDE NETHERLANDS SPACE RES ORG NETHERLANDS UTRECHT NETHERLANDS INST PHYS HOCHTECHNOL JENA GERMANY UNIV HANNOVER,INST HALBLEITERTECHNOL & WERKSTOFFE ELEKTROTECH HANNOVER GERMANY
Titolo Testata:
Journal of microelectromechanical systems
fascicolo: 1, volume: 7, anno: 1998,
pagine: 62 - 68
SICI:
1057-7157(1998)7:1<62:AHSBOA>2.0.ZU;2-5
Fonte:
ISI
Lingua:
ENG
Keywords:
BOLOMETER; CHEMICAL MECHANICAL POLISHING; HIGH T-C SUPERCONDUCTOR; INFRARED DETECTOR; NOISE PROPERTIES; WAFER BONDING;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
9
Recensione:
Indirizzi per estratti:
Citazione:
S. Sanchez et al., "A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE", Journal of microelectromechanical systems, 7(1), 1998, pp. 62-68

Abstract

In this paper, we describe the design, fabrication, and performance of a high-T-c GdBa(2)Cu3O(7-delta) superconductor bolometer positioned on a 2- x 2-mm(2) 1-mu m-thick silicon nitride membrane, The bolometerstructure has an effective area of 0.64 mm(2) and was grown on a specially developed silicon-on-nitride (SON) layer, This laver was made bydirect bonding of silicon nitride to silicon after chemical mechanical polishing, The operation temperature of the bolometer is 85 K, A thermal conductance G = 3.3 . 10(-5) W/K with a time constant of 27 ms has been achieved, The electrical noise equivalent power (NEP) at 5 Hz is 3.7 . 10(-12) WHz(-1/2), which is very close to the theoretical phonon noise limit of 3.6 . 10(-12) WHz(-1/2), meaning that the excess noise of the superconducting film is very low. This bolometer is comparable to other bolometers with respect to high electrical performance, Our investigations are now aimed at decreasing the NEP for 84-mu m radiation by further reduction of G and adding an absorption layer to the detector, This bolometer is intended to be used as a detector in a Fabry-Perot (FP)-based satellite instrument designed for remote sensing ofatmospheric hydroxyl.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 08/07/20 alle ore 01:48:09