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Titolo:
INTERFACE ACOUSTIC MODES OF TWISTED SI(001) WAFERS
Autore:
MOZHAEV VG; TOKMAKOVA SP; WEIHNACHT M;
Indirizzi:
MOSCOW MV LOMONOSOV STATE UNIV,FAC PHYS MOSCOW 117234 RUSSIA RUSSIAN ACAD SCI,INST ACOUST MOSCOW 117036 RUSSIA INST FESTKORPER & WERKSTOFFORSCH D-01069 DRESDEN GERMANY
Titolo Testata:
Journal of applied physics
fascicolo: 6, volume: 83, anno: 1998,
pagine: 3057 - 3060
SICI:
0021-8979(1998)83:6<3057:IAMOTS>2.0.ZU;2-Q
Fonte:
ISI
Lingua:
ENG
Soggetto:
STONELEY WAVES; SILICON;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
15
Recensione:
Indirizzi per estratti:
Citazione:
V.G. Mozhaev et al., "INTERFACE ACOUSTIC MODES OF TWISTED SI(001) WAFERS", Journal of applied physics, 83(6), 1998, pp. 3057-3060

Abstract

Interface acoustic waves at the (001) boundary of twisted single-crystal silicon wafers are studied using analytical and numerical techniques. A secular equation of the problem in an explicit form is derived for the propagation directions along the twist-angle bisectrix and a complete numerical solution is calculated for arbitrary propagation. A new mode of leaky-wave type is predicted. This leaky mode has a low propagation loss and distinct near-interface localization at small twist angles. The leaky wave is purely longitudinal at the interface in the bisectric case. A mode without leakage is found only in the vicinity of the bisectrix directions. Its feature is a rotating movement of interface particles in the plane normal to the propagation direction in the bisectrix case. The sector of azimuthal angles permitted for the propagation of the nonleaky mode has an unusual jumplike behavior as a function of the twist angle. (C) 1998 American Institute of Physics.

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Documento generato il 05/12/20 alle ore 10:12:03